Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 14, 2023
Patent Application Number
16871648
Date Filed
May 11, 2020
Patent Citations
Patent Citations Received
Patent Primary Examiner
A resist composition comprising a base polymer and a sulfonium salt of a carboxylic acid having an iodine or bromine-substituted hydrocarbyl group offers a high sensitivity, minimal LWR and improved CDU, independent of whether it is of positive or negative tone.
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