Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun Hatakeyama0
Masaki Ohashi0
Date of Patent
May 21, 2019
0Patent Application Number
155984280
Date Filed
May 18, 2017
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A resist composition comprising a base polymer and a sulfonium salt of iodized benzoic acid offers a high sensitivity and minimal LWR independent of whether it is of positive or negative tone.
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