Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 8, 2022
Patent Application Number
16919574
Date Filed
July 2, 2020
Patent Citations
Patent Primary Examiner
A resist composition comprising a base polymer and a quencher in the form of an ammonium salt consisting of an ammonium cation having an iodized aromatic ring bonded to the nitrogen atom via a C
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