US Patent 10546748 Tin oxide films in semiconductor device manufacturing
Patent 10546748 was granted and assigned to Lam Research on January, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 12, 2018
0
Date of Patent
January 28, 2020
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Patent Applicant
Patent Application Number
15894635
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Patent Citations Received
Patent Inventor Names
Hui-Jung Wu
0
Boris Volosskiy
0
Jengyi Yu
0
Nader Shamma
0
Richard Wise
0
Samantha Tan
0
Yang Pan
0
Yu Jiang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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