Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 25, 2023
0Patent Application Number
168254730
Date Filed
March 20, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Tin oxide films are used to create air gaps during semiconductor substrate processing. Tin oxide films, disposed between exposed layers of other materials, such as SiO
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