US Patent 11637037 Method to create air gaps
Patent 11637037 was granted and assigned to Lam Research on April, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 20, 2020
0
Date of Patent
April 25, 2023
0
Patent Applicant
Patent Application Number
16825473
0
Patent Citations
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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