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US Patent 10613437 Resist composition and patterning process

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Patent Citations Received
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US Patent 11709426 Resist composition and pattern forming process
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US Patent 11327400 Patterning process
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US Patent 11548961 Compound, resin, resist composition and method for producing resist pattern
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US Patent 11435666 Salt compound, chemically amplified resist composition, and patterning process
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US Patent 11327400 Patterning process
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 US Patent 10613437 Resist composition and patterning process

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10613437
Date of patent
April 7, 2020
Patent application number
15920744
Date Filed
March 14, 2018
Patent primary examiner
‌
John S. Chu

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