US Patent 11322351 Tin oxide films in semiconductor device manufacturing
Patent 11322351 was granted and assigned to Lam Research on May, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 18, 2019
0
Date of Patent
May 3, 2022
0
Patent Applicant
Patent Application Number
16687142
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Patent Citations
Patent Citations Received
Patent Inventor Names
Boris Volosskiy
0
Jengyi Yu
0
Nader Shamma
0
Richard Wise
0
Samantha S. H. Tan
0
Yang Pan
0
Yu Jiang
0
Hui-Jung Wu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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