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US Patent 11404275 Selective deposition using hydrolysis

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Edits on 29 Apr, 2023
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Golden AI
edited on 29 Apr, 2023
Infobox
Patent Citations
‌
US Patent 10832908 Self-aligned multi-patterning process flow with ALD gapfill spacer mask
0
Edits on 28 Apr, 2023
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edited on 28 Apr, 2023
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Edits on 25 Apr, 2023
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Edits on 5 Apr, 2023
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Edits on 2 Apr, 2023
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Edits on 30 Mar, 2023
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edited on 30 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114042750
Date of Patent
August 2, 2022
0
Patent Application Number
169774380
Date Filed
March 1, 2019
0
Patent Citations
‌
US Patent 10038079 Semiconductor device and manufacturing method thereof
0
‌
US Patent 10043656 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
0
‌
US Patent 10074543 High dry etch rate materials for semiconductor patterning applications
0
‌
US Patent 10134579 Method for high modulus ALD SiO2 spacer
0
‌
US Patent 10141505 Bromine containing silicon precursors for encapsulation layers
0
‌
US Patent 10176984 Selective deposition of silicon oxide
0
‌
US Patent 10199212 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
0
‌
US Patent 10242866 Selective deposition of silicon nitride on silicon oxide using catalytic control
0
‌
US Patent 10269559 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10454029 Method for reducing the wet etch rate of a sin film without damaging the underlying substrate
0
‌
US Patent 10460930 Selective growth of SiO2 on dielectric surfaces in the presence of copper
0
‌
US Patent 10490413 Selective growth of silicon nitride
0
‌
US Patent 10559461 Selective deposition with atomic layer etch reset
0
‌
US Patent 10629429 Selective deposition of silicon oxide
0
‌
US Patent 10629435 Doped ALD films for semiconductor patterning applications
0
‌
US Patent 10658172 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10662526 Method for selective deposition using a base-catalyzed inhibitor
0
‌
US Patent 10777407 Selective deposition of silicon nitride on silicon oxide using catalytic control
0
‌
US Patent 10804099 Selective inhibition in atomic layer deposition of silicon-containing films
0
‌
US Patent 10825679 Selective growth of SIO2 on dielectric surfaces in the presence of copper
0
‌
US Patent 10832908 Self-aligned multi-patterning process flow with ALD gapfill spacer mask
0
‌
US Patent 10903071 Selective deposition of silicon oxide
0
‌
US Patent 10998187 Selective deposition with atomic layer etch reset
0
Patent Primary Examiner
‌
Erik Kielin
0
Edits on 28 Mar, 2023
"update citations for inverse infoboxes"
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edited on 28 Mar, 2023
Edits on 25 Mar, 2023
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edited on 25 Mar, 2023
Edits on 24 Mar, 2023
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edited on 24 Mar, 2023
Edits on 22 Mar, 2023
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edited on 22 Mar, 2023
Edits on 28 Sep, 2022
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edited on 28 Sep, 2022
Edits on 26 Sep, 2022
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edited on 26 Sep, 2022
Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
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edited on 26 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Sep, 2022
"Entity importer update"
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edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114042750
Date of Patent
August 2, 2022
0
Patent Application Number
169774380
Date Filed
March 1, 2019
0
Patent Citations
‌
US Patent 10038079 Semiconductor device and manufacturing method thereof
0
‌
US Patent 10043656 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
0
‌
US Patent 10074543 High dry etch rate materials for semiconductor patterning applications
0
‌
US Patent 10134579 Method for high modulus ALD SiO2 spacer
0
‌
US Patent 10141505 Bromine containing silicon precursors for encapsulation layers
0
‌
US Patent 10176984 Selective deposition of silicon oxide
0
‌
US Patent 10199212 Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
0
‌
US Patent 10242866 Selective deposition of silicon nitride on silicon oxide using catalytic control
0
‌
US Patent 10269559 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10454029 Method for reducing the wet etch rate of a sin film without damaging the underlying substrate
0
‌
US Patent 10460930 Selective growth of SiO2 on dielectric surfaces in the presence of copper
0
‌
US Patent 10490413 Selective growth of silicon nitride
0
‌
US Patent 10559461 Selective deposition with atomic layer etch reset
0
‌
US Patent 10629429 Selective deposition of silicon oxide
0
‌
US Patent 10629435 Doped ALD films for semiconductor patterning applications
0
‌
US Patent 10658172 Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
0
‌
US Patent 10662526 Method for selective deposition using a base-catalyzed inhibitor
0
‌
US Patent 10777407 Selective deposition of silicon nitride on silicon oxide using catalytic control
0
‌
US Patent 10804099 Selective inhibition in atomic layer deposition of silicon-containing films
0
‌
US Patent 10825679 Selective growth of SIO2 on dielectric surfaces in the presence of copper
0
‌
US Patent 10832908 Self-aligned multi-patterning process flow with ALD gapfill spacer mask
0
‌
US Patent 10903071 Selective deposition of silicon oxide
0
‌
US Patent 10998187 Selective deposition with atomic layer etch reset
0
Patent Primary Examiner
‌
Erik Kielin
0
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022

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