Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ching-Yu Chang0
An-Ren Zi0
Date of Patent
November 21, 2023
0Patent Application Number
150198360
Date Filed
February 9, 2016
0Patent Citations
Patent Primary Examiner
Patent abstract
Methods and materials for making a semiconductor device are described. The method includes forming a photoresist over a substrate. The photoresist includes an acid-labile group (ALG) connected to a polar unit. The method also includes exposing the photoresist to a radiation beam, baking the photoresist and performing a developing process to the photoresist.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
