Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chia-Chung Chen0
Chi-Feng Huang0
Victor Chiang Liang0
Chung-Hao Chu0
Date of Patent
January 2, 2024
0Patent Application Number
178396820
Date Filed
June 14, 2022
0Patent Citations
0
...
Patent Primary Examiner
Patent abstract
A method of manufacturing a semiconductor structure, comprising providing a substrate; forming a fin structure over the substrate; depositing an insulation material over the fin structure; performing a plurality of ion implantation cycles in-situ with implantation energy increased or decreased stepwise; and removing at least a portion of the insulation material to expose a portion of the fin structure.
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