US Patent 12113014 Integrated circuit including supervia and method of making

An integrated circuit includes a substrate; and a first conductive line extending parallel to a top surface of the substrate. The first conductive line is a first distance from the substrate. The integrated circuit further includes a second conductive line extending parallel to the top surface of the substrate. The second conductive line is a second distance from the substrate. The integrated circuit further includes a third conductive line extending parallel to the top surface of the substrate. The third conductive line is a third distance from the substrate. The integrated circuit further includes a supervia directly connected to the first conductive line and the third conductive line, wherein a first angle between a sidewall of a lower portion of the supervia and the substrate is different from a second angle between a sidewall of an upper portion of the supervia and the substrate.