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US Patent 9028915 Method of forming a photoresist layer
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Patent
Date Filed
September 4, 2012
Date of Patent
May 12, 2015
Patent Application Number
13602465
Patent Citations Received
US Patent 12087578 Semiconductor structure and method of forming the same
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US Patent 11971657 Photoresist developer and method of developing photoresist
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US Patent 11996432 Image sensor device and manufacturing method thereof
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US Patent 12013645 Method for removing resist layer, method of forming a pattern and method of manufacturing a package
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US Patent 12025920 Lithography techniques for reducing defects
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US Patent 12062542 Using cumulative heat amount data to qualify hot plate used for postexposure baking
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US Patent 12074025 Photoresist developer and method of developing photoresist
0
US Patent 12074058 Patterning methods for semiconductor devices
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US Patent 11791161 Pattern fidelity enhancement
US Patent 11841618 Photoresist system and method
0
•••
Patent Inventor Names
Chun-Wei Chang
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Chih-Chien Wang
0
Hung-Chang Hsieh
0
Wang-Pen Mo
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9028915
Patent Primary Examiner
Kirsten Jolley
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