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US Patent D913980 Gas supply plate for semiconductor manufacturing apparatus

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Patent Citations Received
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US Patent D1007449 Target profile for a physical vapor deposition chamber target
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edited on 4 Dec, 2023
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Patent Citations Received
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US Patent D1005974 Gas distributor for semiconductor manufacturing apparatus
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Patent Inventor Names
Hak Joo Lee0
Jeong Jun Woo0
Jong Hyun Ahn0
Yoon Ki Min0
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Patent Citations Received
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US Patent D998575 Collimator for use in a physical vapor deposition (PVD) chamber
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=D09139800
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US Patent D0913980 Gas supply plate for semiconductor manufacturing apparatus US Patent D913980 Gas supply plate for semiconductor manufacturing apparatus

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Patent Number
D09139800
Patent Number
D9139800
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