US Patent 10665501 Deposition of Aluminum oxide etch stop layers
Patent 10665501 was granted and assigned to Lam Research on May, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 22, 2017
Date of Patent
May 26, 2020
Patent Applicant
Patent Application Number
15821097
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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