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US Patent 10741365 Low volume showerhead with porous baffle

Patent 10741365 was granted and assigned to Lam Research on August, 2020 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 11830731 Semiconductor deposition reactor manifolds
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107413650
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
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Current Assignee
Lam Research
Lam Research
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
107413650
Date of Patent
August 11, 2020
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Patent Application Number
146685110
Date Filed
March 25, 2015
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107413650
Patent Citations
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US Patent 10022689 Fluid mixing hub for semiconductor processing tool
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US Patent 10023959 Anti-transient showerhead
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US Patent 10221484 Temperature controlled showerhead
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US Patent 10253412 Deposition apparatus including edge plenum showerhead assembly
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US Patent 10266947 Rotary friction welded blank for PECVD heated showerhead
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US Patent 10358722 Showerhead assembly
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US Patent 10378107 Low volume showerhead with faceplate holes for improved flow uniformity
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US Patent 10400333 Hybrid ceramic showerhead
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US Patent 10403474 Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
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US Patent 10494717 Anti-transient showerhead
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Patent Primary Examiner
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Jeffrie R. Lund
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10741365
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 US Patent 10741365 Low volume showerhead with porous baffle

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10741365
Date of patent
August 11, 2020
Patent application number
14668511
Date Filed
March 25, 2015
Patent citations
‌
US Patent 10022689 Fluid mixing hub for semiconductor processing tool
‌
US Patent 10023959 Anti-transient showerhead
‌
US Patent 10221484 Temperature controlled showerhead
‌
US Patent 10253412 Deposition apparatus including edge plenum showerhead assembly
‌
US Patent 10266947 Rotary friction welded blank for PECVD heated showerhead
‌
US Patent 10358722 Showerhead assembly
‌
US Patent 10378107 Low volume showerhead with faceplate holes for improved flow uniformity
‌
US Patent 10400333 Hybrid ceramic showerhead
‌
US Patent 10403474 Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
‌
US Patent 10494717 Anti-transient showerhead
Patent primary examiner
‌
Jeffrie R. Lund

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