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US Patent 11327400 Patterning process
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Patent
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Date Filed
November 19, 2018
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Date of Patent
May 10, 2022
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Patent Application Number
16194593
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Patent Citations
US Patent 10606172 Resist composition and patterning process
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US Patent 10613436 Resist composition and patterning process
US Patent 10613437 Resist composition and patterning process
US Patent 10725378 Resist composition and patterning process
US Patent 10802400 Resist composition and patterning process
US Patent 10816899 Resist composition and patterning process
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US Patent 11022883 Resist composition and patterning process
US Patent 10968175 Resist composition and patterning process
US Patent 11048165 Resist composition and patterning process
US Patent 10520809 Resist composition and patterning process
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•••
Patent Inventor Names
Tomohiro Kobayashi
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Jun Hatakeyama
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Takeshi Sasami
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11327400
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Patent Primary Examiner
Daborah Chacko-Davis
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CPC Code
G03F 7/039
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G03F 7/0392
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G03F 7/0045
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G03F 7/0397
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G03F 7/2002
0
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