US Patent 11327400 Patterning process
All edits
Edits on 16 Oct, 2023
Golden AI
Edits made to:
Infobox (+3 properties)
Infobox
Patent Inventor Names
Jun Hatakeyama0
Takeshi Sasami0
Tomohiro Kobayashi0
Edits on 3 Apr, 2023
Golden AI
Infobox
Patent Citations
Edits on 2 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
113274000
Date of Patent
May 10, 2022
0Patent Application Number
161945930
Date Filed
November 19, 2018
0Patent Citations
Patent Primary Examiner
Edits on 1 Apr, 2023
Golden AI
Infobox
Patent Citations
Edits on 31 Mar, 2023
Golden AI
Infobox
Patent Citations
Edits on 30 Mar, 2023
Golden AI
Infobox
Patent Citations
Edits on 29 Mar, 2023
Golden AI
Infobox
Patent Citations
Edits on 27 Mar, 2023
Golden AI
Infobox
Patent Citations
Edits on 26 Sep, 2022
Golden AI
Infobox
Patent Citations
Edits on 25 Sep, 2022
Golden AI
Infobox
Patent Citations
Golden AI
Infobox
Patent Citations
Edits on 24 Sep, 2022
Golden AI
Infobox
Patent Citations
Edits on 22 Sep, 2022
Golden AI
Infobox
Patent Citations
Edits on 19 May, 2022
Golden AI
Edits made to:
Infobox (+23 properties)
Article (+165 characters)
US Patent 11327400 Patterning process
Article
A pattern having a good balance of sensitivity, resolution and LWR is formed by providing a resist film comprising a base resin comprising recurring units having a C
Infobox
Is a
Patent jurisdiction
Patent number
11327400
Date of patent
May 10, 2022
Patent application number
16194593
Date Filed
November 19, 2018
Patent citations
Patent primary examiner
Find more entities like US Patent 11327400 Patterning process
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
