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US Patent 11764093 Automatic wafer centering method and apparatus

Patent 11764093 was granted and assigned to Brooks Automation on September, 2023 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Brooks Automation
Brooks Automation
Date Filed
August 10, 2021
Date of Patent
September 19, 2023
Patent Applicant
Brooks Automation
Brooks Automation
Patent Application Number
17398847
Patent Citations
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US Patent 9514974 Process apparatus with on-the-fly substrate centering
‌
US Patent 9548231 Robot and adaptive placement system and method
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US Patent 9842757 Robot and adaptive placement system and method
‌
US Patent 10052766 Automatic in-situ registration and calibration of robotic arm/sensor/workspace system
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US Patent 10134621 Substrate transport apparatus
‌
US Patent 11476138 Diagnostic system of substrate transfer hand
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US Patent 11273558 Substrate transport apparatus
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US Patent 7233841 Vision system
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US Patent 7813832 Method for on the fly positioning and continuous monitoring of a substrate in a chamber
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US Patent 9211643 Automatic in-situ registration and calibration of robotic arm/sensor/workspace system
•••
Patent Inventor Names
Leigh F. Sharrock
Alexander Krupyshev
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11764093
Patent Primary Examiner
‌
Basil T. Jos
CPC Code
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H01L 21/67748
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H01L 21/67754
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H01L 21/68707
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H01L 21/67167
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H01L 21/67248
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H01L 21/67259
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B25J 9/1697
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B25J 11/0095
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B65G 47/905
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H01L 21/67196
•••

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