Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Yu Chen0
Kuan-Wei Huang0
Jyu-Horng Shieh0
Date of Patent
August 20, 2024
0Patent Application Number
183166200
Date Filed
May 12, 2023
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A method includes patterning a mandrel layer over a target layer to form first mandrels and second mandrels, the first mandrels having a larger width than the second mandrels. A spacer layer is formed over the first mandrels and the second mandrels, and altered so that a thickness of the spacer layer over the first mandrels is greater than a thickness of the spacer layer over the second mandrels. Spacers are formed from the spacer layer which have a greater width adjacent the first mandrels than the spacers which are adjacent the second mandrels. The spacers are used to etch a target layer.
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