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US Patent 9869939 Lithography process

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Edits on 6 Nov, 2024
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Golden AI
edited on 6 Nov, 2024
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US Patent 12135499 Reticle enclosure for lithography systems
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Edits on 17 Oct, 2024
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Golden AI
edited on 17 Oct, 2024
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US Patent 12117725 Pellicle for an EUV lithography mask and a method of manufacturing thereof
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Golden AI
edited on 16 Oct, 2024
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US Patent 12119129 EUV lithography apparatus
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Edits on 10 Oct, 2024
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Golden AI
edited on 10 Oct, 2024
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US Patent 12114412 Shock wave visualization for extreme ultraviolet plasma optimization
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Golden AI
edited on 10 Oct, 2024
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US Patent 12114411 Apparatus and method for generating extreme ultraviolet radiation
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Edits on 12 Sep, 2024
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Golden AI
edited on 12 Sep, 2024
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US Patent 12085866 Particle removing assembly and method of cleaning mask for lithography
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Golden AI
edited on 11 Sep, 2024
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US Patent 12085843 Method of manufacturing EUV photo masks
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Golden AI
edited on 11 Sep, 2024
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US Patent 12085585 Particle image velocimetry of extreme ultraviolet lithography systems
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Edits on 21 Aug, 2024
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Golden AI
edited on 21 Aug, 2024
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US Patent 12066761 Inspection tool for an extreme ultraviolet radiation source to observe tin residual
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Golden AI
edited on 21 Aug, 2024
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US Patent 12066755 Pellicle for an EUV lithography mask and a method of manufacturing thereof
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Edits on 7 Aug, 2024
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Golden AI
edited on 7 Aug, 2024
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Edits on 24 Jul, 2024
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Golden AI
edited on 24 Jul, 2024
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Edits on 4 Jul, 2024
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edited on 4 Jul, 2024
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US Patent 12025922 Methods and apparatus for reducing hydrogen permeation from lithographic tool
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Golden AI
edited on 3 Jul, 2024
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US Patent 12028959 EUV light source and apparatus for EUV lithography
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Edits on 26 Jun, 2024
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Golden AI
edited on 26 Jun, 2024
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US Patent 12019367 Mask blanks and methods for depositing layers on mask blank
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Edits on 19 Jun, 2024
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Golden AI
edited on 19 Jun, 2024
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US Patent 12013630 EUV photo masks and manufacturing method thereof
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Edits on 5 Jun, 2024
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Golden AI
edited on 5 Jun, 2024
Edits on 8 May, 2024
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Golden AI
edited on 8 May, 2024
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US Patent 11979971 EUV light source and apparatus for lithography
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Edits on 1 May, 2024
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Golden AI
edited on 1 May, 2024
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US Patent 11973302 Methods and systems for aligning master oscillator power amplifier systems
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Edits on 18 Apr, 2024
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Golden AI
edited on 18 Apr, 2024
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US Patent 11960210 Laser interference fringe control for higher EUV light source and EUV throughput
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