Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Smith0
Dennis M. Hausmann0
Date of Patent
June 12, 2018
0Patent Application Number
149481090
Date Filed
November 20, 2015
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A vacuum-integrated metal oxide-containing hardmask formation process and related vacuum-integrated hardware that combine steps of film formation by vapor deposition and optical lithography results in direct photopatterning of metal oxide-containing hardmasks at substantially reduced cost relative to current approaches.
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