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US Patent 9996004 EUV photopatterning of vapor-deposited metal oxide-containing hardmasks

Patent 9996004 was granted and assigned to Lam Research on June, 2018 by the United States Patent and Trademark Office.

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US Patent 12125711 Reducing roughness of extreme ultraviolet lithography resists
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US Patent 12068170 Vapor phase thermal etch solutions for metal oxo photoresists
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US Patent 11988965 Underlayer for photoresist adhesion and dose reduction
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US Patent 11987876 Chamfer-less via integration scheme
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US Patent 11972948 Adhesion layers for EUV lithography
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US Patent 11947262 Process environment for inorganic resist patterning
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US Patent 11921427 Methods for making hard masks useful in next-generation lithography
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Patent abstract

A vacuum-integrated metal oxide-containing hardmask formation process and related vacuum-integrated hardware that combine steps of film formation by vapor deposition and optical lithography results in direct photopatterning of metal oxide-containing hardmasks at substantially reduced cost relative to current approaches.

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Patent Inventor Names
David Smith0
Dennis M. Hausmann0
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US Patent 09996004 EUV photopatterning of vapor-deposited metal oxide-containing hardmasks US Patent 9996004 EUV photopatterning of vapor-deposited metal oxide-containing hardmasks

Infobox
Patent Number
099960040
Patent Number
99960040
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
099960040
Date of Patent
June 12, 2018
0
Patent Application Number
149481090
Date Filed
November 20, 2015
0
Patent Primary Examiner
‌
John A McPherson
0
Edits on 20 Jan, 2022
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Infobox (+9 properties)
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 US Patent 09996004 EUV photopatterning of vapor-deposited metal oxide-containing hardmasks

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09996004
Date of patent
June 12, 2018
Patent application number
14948109
Date Filed
November 20, 2015
Patent primary examiner
‌
John A McPherson

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