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US Patent 10340125 Pulsed remote plasma method and system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
September 22, 2016
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Date of Patent
July 2, 2019
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Patent Application Number
15273488
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Patent Citations
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US Patent 10032792 Semiconductor device and manufacturing method thereof
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US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film
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US Patent 10083836 Formation of boron-doped titanium metal films with high work function
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US Patent 10087522 Deposition of metal borides
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US Patent 10090316 3D stacked multilayer semiconductor memory using doped select transistor channel
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US Patent 10087525 Variable gap hard stop design
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US Patent 10103040 Apparatus and method for manufacturing a semiconductor device
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US Patent 10032628 Source/drain performance through conformal solid state doping
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US Patent 10023960 Process gas management for an inductively-coupled plasma deposition reactor
Patent Citations Received
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US Patent D913980 Gas supply plate for semiconductor manufacturing apparatus
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US Patent 11289326 Method for reforming amorphous carbon polymer film
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US Patent D947913 Susceptor shaft
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US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
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US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
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US Patent 10559458 Method of forming oxynitride film
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US Patent 10561975 Variable conductance gas distribution apparatus and method
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US Patent D876504 Exhaust flow control ring for semiconductor deposition apparatus
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US Patent 10590535 Chemical treatment, deposition and/or infiltration apparatus and method for using the same
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US Patent 10600673 Magnetic susceptor to baseplate seal
•••
Patent Inventor Names
Jereld Lee Winkler
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10340125
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Patent Primary Examiner
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Allan W. Olsen
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