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US Patent 11684949 CMOS ultrasonic transducers and related apparatus and methods

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 US Patent 11684949 CMOS ultrasonic transducers and related apparatus and methods

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CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.

Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116849490
Date of Patent
June 27, 2023
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Patent Application Number
170863110
Date Filed
October 30, 2020
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Patent Citations
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US Patent 7104129 Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
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US Patent 7247246 Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity
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US Patent 7250353 Method and system of releasing a MEMS structure
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US Patent 7285897 Curved micromachined ultrasonic transducer arrays and related methods of manufacture
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US Patent 7312440 Integrated micro fuel processor and flow delivery infrastructure
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US Patent 7313053 Method and apparatus for controlling scanning of mosaic sensor array
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US Patent 7375420 Large area transducer array
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US Patent 7441321 Method of manufacturing ultrasound transducer device having acoustic backing
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US Patent 7441447 Methods of imaging in probe microscopy
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US Patent 7442570 Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
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US Patent 7518251 Stacked electronics for sensors
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US Patent 7530952 Capacitive ultrasonic transducers with isolation posts
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US Patent 7545012 Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
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US Patent 7557342 Electrospray systems and methods
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US Patent 7564172 Micro-electro-mechanical transducer having embedded springs
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US Patent 7612483 Harmonic cMUT devices and fabrication methods
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US Patent 7612635 MEMS acoustic filter and fabrication of the same
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US Patent 7615834 Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
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US Patent 7622848 Transducer assembly with z-axis interconnect
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US Patent 7637149 Integrated displacement sensors for probe microscopy and force spectroscopy
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US Patent 7646133 Asymmetric membrane cMUT devices and fabrication methods
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US Patent 7687976 Ultrasound imaging system
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US Patent 7759839 Acoustic decoupling in cMUTs
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US Patent 7779696 Separate cMUTs for reception and transmission
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US Patent 7878977 Flexible ultrasound transducer array
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US Patent 7880565 Micro-electro-mechanical transducer having a surface plate
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US Patent 7888709 Capacitive micromachined ultrasonic transducer and manufacturing method
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US Patent 7956510 Modulation in micromachined ultrasonic transducers
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US Patent 8008105 Methods for fabricating micro-electro-mechanical devices
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US Patent 8008835 Multiple element electrode cMUT devices and fabrication methods
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US Patent 8018301 Micro-electro-mechanical transducer having a surface plate
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US Patent 8076821 Multiple element electrode cMUT devices and fabrication methods
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US Patent 8120229 Middle spring supported micro-electro-mechanical transducers
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US Patent 8222065 Method and system for forming a capacitive micromachined ultrasonic transducer
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US Patent 8247945 Micro-electro-mechanical transducers
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US Patent 8277380 Piezoelectric and CMUT layered ultrasound transducer array
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US Patent 8309428 Capacitive micromachined ultrasonic transducer
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US Patent 8327521 Method for production and using a capacitive micro-machined ultrasonic transducer
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US Patent 8334133 Electrosonic cell manipulation device
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US Patent 8345508 Large area modular sensor array assembly and method for making the same
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US Patent 8363514 Variable operating voltage in micromachined ultrasonic transducer
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US Patent 8372011 Asymmetric membrane cMUT devices and fabrication methods
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US Patent 8402831 Monolithic integrated CMUTs fabricated by low-temperature wafer bonding
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US Patent 8429808 Method for fabrication an electrical transducer
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US Patent 8451693 Micromachined ultrasonic transducer having compliant post structure
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US Patent 8526271 Capacitive micromachined ultrasonic transducer with voltage feedback
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US Patent 8559274 Dual-mode operation micromachined ultrasonic transducer
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US Patent 8563345 Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements
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US Patent 8564076 Internal electrical contact for enclosed MEMS devices
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US Patent 8587078 Integrated circuit and fabricating method thereof
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US Patent 8647279 Volume mechanical transducer for medical diagnostic ultrasound
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US Patent 8658453 Capacitive micromachined ultrasonic transducer
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US Patent 8665672 Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion device
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US Patent 9061318 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 9067779 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 9242275 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 9290375 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 9394162 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 9499392 CMOS ultrasonic transducers and related apparatus and methods
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US Patent 9499395 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 9505030 Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
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US Patent 9533873 CMOS ultrasonic transducers and related apparatus and methods
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US Patent 9718098 CMOS ultrasonic transducers and related apparatus and methods
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US Patent 9738514 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 9944514 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 10175206 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 10177139 Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
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US Patent 10228353 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 10247708 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 10266401 Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same
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US Patent 10272470 CMOS ultrasonic transducers and related apparatus and methods
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US Patent 10512936 Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
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US Patent 10518292 CMOS ultrasonic transducers and related apparatus and methods
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US Patent 10525506 Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
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US Patent 10782269 Microfabricated ultrasonic transducers and related apparatus and methods
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US Patent 10843227 CMOS ultrasonic transducers and related apparatus and methods
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Patent Primary Examiner
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Victor A Mandala
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CPC Code
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G10K 9/12
0
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G10K 11/18
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B06B 1/02
0
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B06B 1/0292
0
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B81C 2203/0771
0
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B81C 2203/0735
0
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B81C 2203/0127
0
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B81C 2203/0118
0
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B81C 1/00
0
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B81C 1/00158
0
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B81B 3/00
0
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B81B 3/0021
0
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B81B 2207/015
0
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B81B 2203/0315
0

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