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US Patent 9529268 Systems and methods for improving pattern transfer

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Edits on 6 Nov, 2024
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Golden AI
edited on 6 Nov, 2024
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US Patent 12135499 Reticle enclosure for lithography systems
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Edits on 30 Oct, 2024
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Golden AI
edited on 30 Oct, 2024
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US Patent 12130556 Plasma position control for extreme ultraviolet lithography light sources
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edited on 30 Oct, 2024
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US Patent 12130548 Extreme ultraviolet mask with reduced wafer neighboring effect
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Edits on 17 Oct, 2024
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Golden AI
edited on 17 Oct, 2024
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US Patent 12117725 Pellicle for an EUV lithography mask and a method of manufacturing thereof
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Golden AI
edited on 16 Oct, 2024
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US Patent 12119129 EUV lithography apparatus
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Edits on 10 Oct, 2024
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Golden AI
edited on 10 Oct, 2024
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US Patent 12114412 Shock wave visualization for extreme ultraviolet plasma optimization
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Golden AI
edited on 10 Oct, 2024
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US Patent 12114411 Apparatus and method for generating extreme ultraviolet radiation
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Edits on 12 Sep, 2024
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Golden AI
edited on 12 Sep, 2024
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US Patent 12085866 Particle removing assembly and method of cleaning mask for lithography
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Golden AI
edited on 11 Sep, 2024
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US Patent 12085843 Method of manufacturing EUV photo masks
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Golden AI
edited on 11 Sep, 2024
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US Patent 12085585 Particle image velocimetry of extreme ultraviolet lithography systems
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Golden AI
edited on 11 Sep, 2024
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US Patent 12087578 Semiconductor structure and method of forming the same
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Edits on 28 Aug, 2024
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edited on 28 Aug, 2024
Edits on 21 Aug, 2024
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Golden AI
edited on 21 Aug, 2024
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US Patent 12066761 Inspection tool for an extreme ultraviolet radiation source to observe tin residual
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Golden AI
edited on 21 Aug, 2024
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US Patent 12066755 Pellicle for an EUV lithography mask and a method of manufacturing thereof
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Edits on 7 Aug, 2024
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Golden AI
edited on 7 Aug, 2024
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Edits on 24 Jul, 2024
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edited on 24 Jul, 2024
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edited on 24 Jul, 2024
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Edits on 4 Jul, 2024
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edited on 4 Jul, 2024
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US Patent 12025922 Methods and apparatus for reducing hydrogen permeation from lithographic tool
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