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David A. Vanore

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Екатерина Петровская
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Patent primary examiner of
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US Patent 7095031 Method of automatically correcting aberrations in charged-particle beam and apparatus therefor
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US Patent 7102124 Multi-axial positioning mechanism for a FIMS system port door
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US Patent 7115881 Positioning and motion control by electrons, ions, and neutrals in electric fields
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US Patent 7119332 Method of fabricating probe for scanning probe microscope
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US Patent 7119333 Ion detector for ion beam applications
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US Patent 7119343 Mechanical oscillator for wafer scan with spot beam
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US Patent 7122790 Matrix-free desorption ionization mass spectrometry using tailored morphology layer devices
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US Patent 7122806 Laser stimulated atom probe characterization of semiconductor and dielectric structures
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US Patent 7122809 Charged beam writing method and writing tool
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US Patent 7125632 Fiber optic devices having volume Bragg grating elements
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US Patent 7126142 Source loading apparatus for imaging systems
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US Patent 11175248 Apparatus and method for detecting time-dependent defects in a fast-charging device
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US Patent 11177048 Method and system for evaluating objects
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US Patent 7138644 Rotatable and replaceable plunger type multi-source radiator
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US Patent 7141783 Apparatus for focusing particle beam using radiation pressure
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US Patent 7141812 Devices, methods, and systems involving castings
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US Patent 7145154 Method of automatically correcting aberrations in charged-particle beam and apparatus therefor
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US Patent 7145330 Scanning magnetic microscope having improved magnetic sensor
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US Patent 7148473 Time of flight mass spectrometer
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US Patent 7148497 Variable wavelength ultraviolet lamp
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US Patent 7154089 Scanning electron microscope
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US Patent 7154107 Particle beam irradiation system and method of adjusting irradiation field forming apparatus
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US Patent 7161146 Method and apparatus for producing an ion beam from an ion guide
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US Patent 7161159 Dual beam system
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US Patent 7173243 Non-feature-dependent focusing
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US Patent 7173254 Compact germicidal lamp having multiple wavelengths
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US Patent 7176468 Method for charging substrate to a potential
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US Patent 7176472 Radioactive substance container, manufacturing apparatus thereof and manufacturing method thereof
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US Patent 7183565 Source multiplexing in lithography
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US Patent 7189977 Electrospray mass spectrometer and ion source
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US Patent 7193222 Secondary electron detector, especially in a scanning electron microscope
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US Patent 7199383 Method for reducing particles during ion implantation
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US Patent 7208729 Monolithic micro-engineered mass spectrometer
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US Patent 7211806 Particle beam apparatus
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US Patent 7223967 Side-to-side FAIMS apparatus having an analyzer region with non-uniform spacing and method therefore
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US Patent 7227161 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
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US Patent 7235794 System and method for inspecting charged particle responsive resist
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US Patent 7235801 Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby
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US Patent 7238936 Detector with increased dynamic range
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US Patent 7238957 Methods and apparatus for presenting images
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US Patent 7242012 Lithography device for semiconductor circuit pattern generator
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US Patent 7244931 Ion mobility spectrometer with parallel running drift gas and ion carrier gas flows
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US Patent 7244952 Combinations of deflection chopping systems for minimizing energy spreads
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US Patent 7246949 Device for transmitting optical signals
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US Patent 7247847 Mass spectrometers and methods of ion separation and detection
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US Patent 7247849 Automated focusing of electron image
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US Patent 7247863 System and method for rapidly controlling the output of an ion source for ion implantation
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US Patent 7247869 Particle therapy system
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US Patent 7250619 Powered sterile solution device
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US Patent 7250621 Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
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US Patent 7253405 Mass analysis apparatus and method for mass analysis
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US Patent 7256408 Gas supply unit, gas supply method and exposure system
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US Patent 7259370 Mixing chamber probe adaptor
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US Patent 7262409 Chemical etch solution and technique for imaging a device's shallow junction profile
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US Patent 7276692 Beam adjusting sample, beam adjusting method and beam adjusting device
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US Patent 7279679 Methods and systems for peak detection and quantitation
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US Patent 7279686 Integrated sub-nanometer-scale electron beam systems
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US Patent 7282728 Modular fixture
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US Patent 7288774 Transverse magnetic field voltage isolator
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US Patent 7291845 Method for controlling space charge-driven ion instabilities in electron impact ion sources
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US Patent 7301145 Daughter ion spectra with time-of-flight mass spectrometers
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US Patent 7306344 Light guide array, fabrication methods and optical system employing same
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US Patent 7309864 Method for analysing physical and/or chemical properties of the surface layer of a solid body (variants)
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US Patent 7312441 Method and apparatus for controlling the ion population in a mass spectrometer
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US Patent 7315029 Electrostatic deflection system with low aberrations and vertical beam incidence
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US Patent 7319230 Disinfection and decontamination using ultraviolet light
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US Patent 7329878 Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same
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US Patent 7342224 Obtaining tandem mass spectrometry data for multiple parent ions in an ion population
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US Patent 7345291 Device for irradiation therapy with charged particles
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US Patent 7351971 Charged-particle beam instrument and method of detection
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US Patent 7355190 Debris mitigation device
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US Patent 7358511 Plasma doping method and plasma doping apparatus
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US Patent 7361895 Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
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US Patent 11183359 Charged particle beam apparatus
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US Patent 11183360 Optical system with compensation lens
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US Patent 11183361 Charged particle beam device and method for inspecting and/or imaging a sample
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US Patent 11183363 Scanning electron microscope apparatus and operation method thereof
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US Patent 7365312 Method and apparatus for enhanced sequencing of complex molecules using surface-induced dissociation in conjunction with mass spectrometric analysis
‌
US Patent 7365319 Method for providing barrier fields at the entrance and exit end of a mass spectrometer
‌
US Patent 7365324 Testing apparatus using charged particles and device manufacturing method using the testing apparatus
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US Patent 7365325 Method and apparatus for observing a specimen
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US Patent 7372051 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
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US Patent 7375351 Micro-column electron beam apparatus
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US Patent 7381948 Mass spectroscope and method of calibrating the same
‌
US Patent 7381968 Charged particle beam apparatus and specimen holder
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US Patent 7381978 Contact opening metrology
‌
US Patent 7385183 Substrate processing apparatus using neutralized beam and method thereof
‌
US Patent 7385198 Method and apparatus for measuring the physical properties of micro region
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US Patent 7385202 Divergent charged particle implantation for improved transistor symmetry
‌
US Patent 7385204 Fluid treatment device
‌
US Patent 7388194 Method and system for high-throughput quantitation using laser desorption and multiple-reaction-monitoring
‌
US Patent 7388197 Multiplex data acquisition modes for ion mobility-mass spectrometry
‌
US Patent 7388218 Subsurface imaging using an electron beam
‌
US Patent 7391016 Method for quantitative analysis of mixtures of compounds
‌
US Patent 7391023 Lithography tool image quality evaluating and correcting
‌
US Patent 7391033 Skew-oriented multiple electron beam apparatus and method
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US Patent 7391034 Electron imaging beam with reduced space charge defocusing
‌
US Patent 7391039 Semiconductor processing method and system
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US Patent 7391042 Radiation protection system and method for using the same
‌
US Patent 7394070 Method and apparatus for inspecting patterns
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US Patent 7394080 Mask superposition for multiple exposures
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US Patent 7397044 Imaging mode for linear accelerators
‌
US Patent 7397046 Method for implanter angle verification and calibration
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US Patent 7397053 Electron beam control method, electron beam drawing apparatus and method of fabricating a semiconductor device
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US Patent 7397054 Particle beam therapy system and control system for particle beam therapy
‌
US Patent 7399962 All-mass MS/MS method and apparatus
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US Patent 7399964 Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
‌
US Patent 7402736 Method of fabricating a probe having a field effect transistor channel structure
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US Patent 7402798 Apparatus and method for controlling an electrostatically induced liquid spray
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US Patent 7402799 MEMS mass spectrometer
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US Patent 7402800 Method and device for the continuous determination of damage to systems used for the post-treatment of heat engine exhaust gases
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US Patent 7402801 Inspecting method of a defect inspection device
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US Patent 7402818 Tactical integrated illumination countermeasure system
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US Patent 7405397 Laser desorption ion source with ion guide coupling for ion mass spectroscopy
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US Patent 7405407 Ion beam therapy system and its couch positioning method
‌
US Patent 7405417 Lithographic apparatus having a monitoring device for detecting contamination
‌
US Patent 7408153 Apparatus for detecting chemical substances and method therefor
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US Patent 7408154 Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes
‌
US Patent 7408178 Method for the removal of a microscopic sample from a substrate
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US Patent 7408759 Self-cleaning ionization system
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US Patent 7411181 System and method for manipulating and processing materials using holographic optical trapping
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US Patent 7411182 Reverse-taylor cone ionization systems and methods of use thereof
‌
US Patent 7411183 User customizable plate handling for MALDI mass spectrometry
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US Patent 7411188 Method and system for non-destructive distribution profiling of an element in a film
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US Patent 7411192 Focused ion beam apparatus and focused ion beam irradiation method
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US Patent 7411204 Devices, methods, and systems involving castings
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US Patent 7414243 Transmission ion microscope
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US Patent 7414252 Method and apparatus for the automated process of in-situ lift-out
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US Patent 7417222 Correlation ion mobility spectroscopy
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US Patent 7417223 Method, system and computer software product for specific identification of reaction pairs associated by specific neutral differences
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US Patent 7417235 Particle detector for secondary ions and direct and or indirect secondary electrons
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US Patent 7417239 Method and device for electron beam irradiation
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US Patent 7417241 Ion implantation method and method for manufacturing semiconductor device
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US Patent 7423260 Apparatus for combined laser focusing and spot imaging for MALDI
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US Patent 7423267 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
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US Patent 7425701 Electron-beam device and detector system
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US Patent 7425703 Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method
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US Patent 7425710 Anode layer particle beam device
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US Patent 7425716 Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam
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US Patent 7425717 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
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US Patent 7428347 Optical signal transmission transducer
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US Patent 7429743 Irradiation system ion beam and method to enhance accuracy of irradiation
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US Patent 7432501 Ionising particle analyser enabling for example the separation of the fluorescent yield (FY) and the total electron yield (TEY) in EXAPS (extended X-ray absorption fine structure) measurements
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US Patent 7432519 Radiation protection material based on silicone
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US Patent 7433572 Optical bypass method and architecture
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US Patent 7435958 Electron beam apparatus and method for production of its specimen chamber
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US Patent 7439498 Method and apparatus for separation of isobaric interferences
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US Patent 7439499 Multiple electrospray probe interface for mass spectrometry
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US Patent 7439503 Charged particle beam irradiation method, method of manufacturing semiconductor device and charged particle beam apparatus
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US Patent 7439504 Pattern inspection method and apparatus using electron beam
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US Patent 7439520 Ion optics systems
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US Patent 7439526 Beam neutralization in low-energy high-current ribbon-beam implanters
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US Patent 7439529 High current density ion source
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US Patent 7440664 Microstructured optical waveguide for providing periodic and resonant structures
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US Patent 7442923 Scanning electron microscope
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US Patent 7442927 Scanning ion probe systems and methods of use thereof
‌
US Patent 7442944 Ion beam implant current, spot width and position tuning
‌
US Patent 7442948 Contamination barrier and lithographic apparatus
‌
US Patent 7446313 Scanning electron microscope
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US Patent 7446320 Electronically-variable immersion electrostatic lens
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US Patent 7446324 Methods utilizing scanning probe microscope tips and products thereof or produced thereby
‌
US Patent 7449679 System and method for manipulating and processing materials using holographic optical trapping
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US Patent 7449682 System and method for depth profiling and characterization of thin films
‌
US Patent 7449691 Detecting apparatus and device manufacturing method
‌
US Patent 7453062 Energy-filtering cathode lens microscopy instrument
‌
US Patent 7453075 Charged particle beam exposure system
‌
US Patent 7456390 Longitudinal field driven ion mobility filter and detection system
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US Patent 7456396 Isolating ions in quadrupole ion traps for mass spectrometry
‌
US Patent 7456413 Apparatus for evacuating a sample
‌
US Patent 7459695 Apparatus, and systems for processing and treating a biological fluid with light
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US Patent 7459707 Exposure apparatus, light source apparatus and device fabrication
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US Patent 7462818 Determination of chemical empirical formulas of unknown compounds using accurate ion mass measurement of all isotopes
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US Patent 7462819 Statistical methods applied to surface chemistry in minerals flotation
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US Patent 7462844 Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation
‌
US Patent 7462852 Devices, methods, and systems involving cast collimators
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US Patent 7462853 Radioactive substance containment vessel, and radioactive substance containment vessel producing device and producing method
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US Patent 7462854 Collimator fabrication
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US Patent 7463799 Temperature compensation of Bragg reflection gratings
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US Patent 7470900 Compensating for field imperfections in linear ion processing apparatus
‌
US Patent 7470905 High Z material detection system and method
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US Patent 7473890 Manipulation of objects in potential energy landscapes
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US Patent 7473911 Specimen current mapper
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US Patent 7473917 Lithographic apparatus and method
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US Patent 7476854 High speed, multiple mass spectrometry for ion sequencing
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US Patent 7476870 Methods of fluid irradiation using ultraviolet reflecting compositions
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US Patent 7476875 Contact opening metrology
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US Patent 7477818 Bragg grating elements for optical devices
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US Patent 7479633 Methodology for critical dimension metrology using stepper focus monitor information
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US Patent 7482577 System and method of sorting materials using holographic laser steering
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US Patent 7482581 Fourier transform mass spectrometer and method for generating a mass spectrum therefrom
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US Patent 7482585 Testing chip and micro integrated analysis system
‌
US Patent 7482586 Methods for sample preparation and observation, charged particle apparatus
‌
US Patent 7482597 Method and device for generating Alfvén waves
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US Patent 7482605 Energy filter device
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US Patent 7482606 Apparatus and method for compensation of movements of a target volume during ion beam irradiation
‌
US Patent 7482607 Method and apparatus for producing x-rays, ion beams and nuclear fusion energy
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US Patent RE40632 Mass spectrometer system including a double ion guide interface and method of operation
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US Patent 7485858 Inspection method for semiconductor wafer and apparatus for reviewing defects
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US Patent 7485874 Apparatus for manufacturing semiconductor substrates
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US Patent 7485883 Variable wavelength radiation source
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US Patent 7485884 Radioactive substance container, manufacturing apparatus thereof and manufacturing method thereof
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US Patent 7488936 TFT array inspecting apparatus
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US Patent 7488959 Apparatus and method for partial ion implantation
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US Patent 7488963 Flexible polymer sheet filled with heavy metal having a low total weight
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US Patent 7491950 Method for retrofitting concrete structures
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US Patent 7495209 Control of the filling level in ion cyclotron resonance mass spectrometers
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US Patent 7495210 Micro fluidic gas assisted ionization device and method
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US Patent 7495213 Method and apparatus for providing ion barriers at the entrance and exit ends of a mass spectrometer
‌
US Patent 7498565 Method of and system for selective cell destruction
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US Patent 7498568 Real-time analysis of mass spectrometry data for identifying peptidic data of interest
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US Patent 7498570 Ion mobility spectrometer
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US Patent 7498589 Scanning probe microscope
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US Patent 7498592 Non-ambipolar radio-frequency plasma electron source and systems and methods for generating electron beams
‌
US Patent 7498593 Terahertz radiation sources and methods
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US Patent 7498595 Positron radioactive drug radiation shielding device
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US Patent 7501622 Ion storage device
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US Patent 7501638 Charged particle beam emitting device and method for operating a charged particle beam emitting device
‌
US Patent 7504619 Energetic neutral particle lithographic apparatus and process
‌
US Patent 7504640 Ionization of desorbed molecules
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US Patent 7504646 Containers for pharmaceuticals, particularly for use in radioisotope generators
‌
US Patent 7507959 Method for charging substrate to a potential
‌
US Patent 7507962 Electron-beam device and detector system
‌
US Patent 7507973 UV treatment reactor
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US Patent 7511268 Ion mobility spectrometer and its method of operation
‌
US Patent 7511270 Nanotube probe and a method for manufacturing the same
‌
US Patent 7511272 Method for controlling charged particle beam, and charged particle beam apparatus
‌
US Patent 7511289 Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle
‌
US Patent 11185717 Gantry charged particle nozzle system—rolling floor interface apparatus and method of use thereof
‌
US Patent 11187707 Method of characterization of visible and/or sub-visible particles in biologics
‌
US Patent 11189457 Scanning electron microscope
‌
US Patent 7518103 Pulsed flow modulation gas chromatography mass spectrometry with supersonic molecular beams method and apparatus
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US Patent 7518136 Devices, methods, and systems involving cast computed tomography collimators
‌
US Patent 7525089 Method of measuring a critical dimension of a semiconductor device and a related apparatus
‌
US Patent 7525105 Laser desorption—electrospray ion (ESI) source for mass spectrometers
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US Patent 7525109 Method for writing a large-area closed curvilinear pattern with a cartesian electron beam writing system
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US Patent 7528385 Fiber optic devices having volume Bragg grating elements
‌
US Patent 7528386 Submicron particle removal
‌
US Patent 7528394 Focused ion beam system
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US Patent 7531793 Tandem mass spectrometry system
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US Patent 7531794 Method and apparatus for preparing specimen
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US Patent 7533564 Micro sample heating apparatus and method of making the same
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US Patent 7534338 Methods and devices for concentration and purification of analytes for chemical analysis including matrix-assisted laser desorption/ionization(MALDI) mass spectrometry (MS)
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US Patent 7534997 Mass spectrometer interface for atmospheric ionization ion sources
‌
US Patent 7535013 Extreme UV radiation exposure tool and extreme UV radiation source device
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US Patent 7541602 System and method for noninvasively monitoring conditions of a subject
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US Patent 7544930 Tandem type mass analysis system and method
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US Patent 7544931 Mass-analyzing method
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US Patent 7544932 Contiguous capillary electrospray sources and analytical devices
‌
US Patent 7544935 Method and apparatus for evaluating thin films
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US Patent 7544939 Method for determining the aberration coefficients of the aberration function of a particle-optical lens
‌
US Patent 7544954 Device for operating gas in vacuum or low-pressure environment and for observation of the operation
‌
US Patent 7544960 Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
‌
US Patent 7547884 Pattern defect inspection method and apparatus thereof
‌
US Patent 7550721 Method and apparatus for depositing samples on a target surface
‌
US Patent 7550722 Focal plane detector assembly of a mass spectrometer
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US Patent 7550724 Electron beam device and its control method
‌
US Patent 7550741 Inertial electrostatic confinement fusion
‌
US Patent 7550743 Chamberless substrate handling
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US Patent 7550744 Chamberless substrate handling
‌
US Patent 7550750 Method and apparatus for processing a micro sample
‌
US Patent 7553334 Defective product inspection apparatus, probe positioning method and probe moving method
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US Patent 7553335 Scanning probe microscope probe and manufacturing method therefor, scanning probe microscope and using method therefor, needle-like body and manufacturing method therefor, electronic device and manufacturing method therefor, charge density wave quantum phase microscope, and charge density wave quantum interferometer
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US Patent 7554103 Increased tool utilization/reduction in MWBC for UV curing chamber
‌
US Patent 7554104 Bolt and semiconductor manufacturing apparatus
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US Patent 7554105 Lithographic apparatus and device manufacturing method
‌
US Patent 7554107 Writing method and writing apparatus of charged particle beam, positional deviation measuring method, and position measuring apparatus
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US Patent 7554108 Forming a semiconductor device feature using acquired parameters
‌
US Patent 7554245 Ultrasonic probe
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US Patent 7557342 Electrospray systems and methods
‌
US Patent 7560693 Electron-beam size measuring apparatus and size measuring method with electron beams
‌
US Patent 7560717 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
‌
US Patent 7564044 Method of inspecting thin film magnetic head element using scanning electron microscope, and inspecting holding jig
‌
US Patent 7564048 Automated faraday sensor test system
‌
US Patent 7564049 Pattern drawing system, electrically charged beam drawing method, photomask manufacturing method, and semiconductor device manufacturing method
‌
US Patent 7566882 Reflection lithography using rotating platter
‌
US Patent 7566884 Specimen holder for electron microscope
‌
US Patent 7566885 Device for sterilizing a fluid
‌
US Patent 7566886 Throughput enhancement for scanned beam ion implanters
‌
US Patent 7566888 Method and system for treating an interior surface of a workpiece using a charged particle beam
‌
US Patent 7566890 UV light source
‌
US Patent 7566892 Electron beam apparatus and method for production of its specimen chamber
‌
US Patent 7569077 Position control for scanning probe spectroscopy
‌
US Patent 7569815 GC mass spectrometry interface and method
‌
US Patent 7569818 Method to reduce cross talk in a multi column e-beam test system
‌
US Patent 7569834 High resolution charged particle projection lens array using magnetic elements
‌
US Patent 7569838 Electron beam inspection system and inspection method and method of manufacturing devices using the system
‌
US Patent 7569841 Deflection signal compensation for charged particle beam
‌
US Patent 7572300 Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth
‌
US Patent 7573028 Ion drive and odor emitter
‌
US Patent 7573030 Specimen observation method
‌
US Patent 7573045 Plasmon wave propagation devices and methods
‌
US Patent 7573053 Polarized pulsed front-end beam source for electron microscope
‌
US Patent 7576337 Power supply for an ion implantation system
‌
US Patent 7576341 Lithography systems and methods for operating the same
‌
US Patent 7576344 Target positioner
‌
US Patent 7578853 Scanning probe microscope system
‌
US Patent 7579585 Method and apparatus for scanning an ion trap mass spectrometer
‌
US Patent 7579589 Ultra compact ion mobility based analyzer apparatus, method, and system
‌
US Patent 7579603 Particle therapy device and method of designing a radiation path
‌
US Patent 7579606 Method and system for logic design for cell projection particle beam lithography
‌
US Patent 7579609 Coupling light of light emitting resonator to waveguide
‌
US Patent 7582861 Mass spectrometer
‌
US Patent 7582868 Method of nano thin film thickness measurement by auger electron spectroscopy
‌
US Patent 7582881 Lithographic apparatus and device manufacturing method
‌
US Patent 7582885 Charged particle beam apparatus
‌
US Patent 7582886 Gantry for medical particle therapy facility
‌
US Patent 7586088 Mass spectrometer and method of mass spectrometry
‌
US Patent 7586091 Mass spectrometric system and mass spectrometry
‌
US Patent 7586102 Automated system for formulating radiopharmaceuticals
‌
US Patent 7586103 High refractive index fluids for immersion lithography
‌
US Patent 7586108 Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
‌
US Patent 7586112 Particle therapy system
‌
US Patent 7586113 EUV illumination system
‌
US Patent 7588605 Scanning type probe microscope
‌
US Patent 7589318 Mass defect triggered information dependent acquisition
‌
US Patent 7589322 Sample measuring device
‌
US Patent 7589323 Superconducting X-ray detector and X-ray analysis apparatus using the same
‌
US Patent 7589334 Ion beam delivery equipment and an ion beam delivery method
‌
US Patent 7589336 Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors
‌
US Patent 7589358 Phosphor single crystal substrate and method for preparing the same, and nitride semiconductor component using the same
‌
US Patent 7591858 Mirror optic for near-field optical measurements
‌
US Patent 7592590 Charged particle beam device with detection unit switch and method of operation thereof
‌
US Patent 7592605 Radioisotope generator and method of construction thereof
‌
US Patent 7592606 Manufacturing equipment using ION beam or electron beam
‌
US Patent 7592607 Device for treating a flowing fluid
‌
US Patent 7592611 Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam
‌
US Patent 7595484 Mass spectrometric method, mass spectrometric system, diagnosis system, inspection system, and mass spectrometric program
‌
US Patent 7595486 RF multipole ion guides for broad mass range
‌
US Patent 7595495 Microreactor device and microchannel cleaning method
‌
US Patent 7595496 Optimized correction of wafer thermal deformations in a lithographic process
‌
US Patent 7598487 Micro-hydrocarbon analysis
‌
US Patent 7598499 Charged-particle exposure apparatus
‌
US Patent 7598500 Ion source and metals used in making components thereof and method of making same
‌
US Patent 7598505 Multichannel ion gun
‌
US Patent 7598507 Adjustable lithography blocking device and method
‌
US Patent 7598508 Gaseous extreme-ultraviolet spectral purity filters and optical systems comprising same
‌
US Patent 7601951 Configuration of an atmospheric pressure ion source
‌
US Patent 7601952 Method of operating a mass spectrometer to provide resonant excitation ion transfer
‌
US Patent 7601968 Charged particle beam writing method and apparatus
‌
US Patent 7601974 Charged particle beam apparatus
‌
US Patent 7601976 Dual beam system
‌
US Patent 7605381 Charged particle beam alignment method and charged particle beam apparatus
‌
US Patent 7605385 Electro-less discharge extreme ultraviolet light source
‌
US Patent 7605386 Optical device with raster elements, and illumination system with the optical device
‌
US Patent 7606456 Apparatus for the collection and transmission of electromagnetic radiation
‌
US Patent 7608817 Adiabatically-tuned linear ion trap with fourier transform mass spectrometry with reduced packet coalescence
‌
US Patent 7608818 Compact gas chromatography and ion mobility based sample analysis systems, methods, and devices
‌
US Patent 7608819 Mass spectrometer
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US Patent 7608839 Plasma source and applications thereof
‌
US Patent 7608842 Driving scanning fiber devices with variable frequency drive signals
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US Patent 7608843 Method and apparatus for scanning a workpiece through an ion beam
‌
US Patent 7608844 Charged particle beam drawing apparatus
‌
US Patent 7609067 Electronic portion of an ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement
‌
US Patent 7612335 Method and apparatus for ion fragmentation by electron capture
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US Patent 7612353 Lithographic apparatus, contaminant trap, and device manufacturing method
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US Patent 7615742 Measurement of light fragment ions with ion traps
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US Patent 7615746 Method and apparatus for evaluating pattern shape of a semiconductor device
‌
US Patent 7615763 System for magnetic scanning and correction of an ion beam
‌
US Patent 7615764 Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus
‌
US Patent 7615766 Target supplier
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US Patent 7615767 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
‌
US Patent 7619212 Chromatographic analyzer
‌
US Patent 7619214 Spectrometer chip assembly
‌
US Patent 7619223 Beam current measuring instrument and beam current measuring method using same
‌
US Patent 7619233 Light source
‌
US Patent 7622711 Mass spectrometer
‌
US Patent 7622725 Impurity introducing apparatus and impurity introducing method
‌
US Patent 7626161 Ion mobility separation devices
‌
US Patent 7626164 Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics
‌
US Patent 7626182 Radiation pulse energy control system, lithographic apparatus and device manufacturing method
‌
US Patent 7626184 Impurity introducing apparatus and impurity introducing method
‌
US Patent 7629576 Gold implantation/deposition of biological samples for laser desorption two and three dimensional depth profiling of biological tissues
‌
US Patent 7629577 Foreign matter or abnormal unsmoothness inspection apparatus and foreign matter or abnormal unsmoothness inspection method
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US Patent 7629596 Method of producing 3-D mold, method of producing finely processed product, method of producing fine-pattern molded product, 3-D mold, finely processed product, fine-pattern molded product and optical component
‌
US Patent 7629597 Deposition reduction system for an ion implanter
‌
US Patent 7633056 Particle movement device
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US Patent 7633063 Charged particle beam apparatus
‌
US Patent 7633073 Lithographic apparatus and device manufacturing method
‌
US Patent 7635392 Scanning probe microscopy cantilever, corresponding manufacturing method, scanning probe microscope, and scanning method
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US Patent 7638759 Hyperthermal neutral beam source and method of operating
‌
US Patent 7638763 Method and apparatus for scaling intensity data in a mass spectrometer
‌
US Patent 7638765 FAIMS cell with separate desolvation and carrier gas inlets
‌
US Patent 7638767 Scanning electron microscope
‌
US Patent 7638780 UV cure equipment with combined light path
‌
US Patent 7638781 Local pressure sensing in a plasma processing system
‌
US Patent 7638782 Semiconductor device manufacturing method and ion implanter used therein
‌
US Patent 7638784 Radiation protection system
‌
US Patent 7642530 Ion implantation apparatus and ion implanting method
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US Patent 7642534 Multileaf collimator for electron radiotherapy
‌
US Patent 7644447 Scanning probe microscope capable of measuring samples having overhang structure
‌
US Patent 7645983 Ion source and mass spectrometer instrument using the same
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US Patent 7645985 Method and apparatus for magnetic separation of ions
‌
US Patent 7645988 Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus
‌
US Patent 7646003 Focusing apparatus and lithography system using the same
‌
US Patent 7646004 Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element
‌
US Patent 7649187 Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated
‌
US Patent 7652247 Aerodynamic lens
‌
US Patent 7652248 Inspection apparatus and inspection method
‌
US Patent 7652263 Focussing lens for charged particle beams
‌
US Patent 7652264 Filament member, ion source, and ion implantation apparatus
‌
US Patent 7652265 Air treatment system
‌
US Patent 7652270 Techniques for ion beam current measurement using a scanning beam current transformer
‌
US Patent 7652272 Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
‌
US Patent 7655930 Ion source arc chamber seal
‌
US Patent 7655934 Data on light bulb
‌
US Patent 7659525 Apparatus for and method of recording image
‌
US Patent 7659527 Infrared marking device and methods
‌
US Patent 7659528 Particle beam irradiation system
‌
US Patent 7659530 Focusing and shielding device for encephalic photon knife
‌
US Patent 7663102 High current density particle beam system
‌
US Patent 7663103 Line-width measurement adjusting method and scanning electron microscope
‌
US Patent 7663127 EUV debris mitigation filter and method for fabricating semiconductor dies using same
‌
US Patent 7667194 Method of producing microarray
‌
US Patent 7667197 Mass analyzing apparatus
‌
US Patent 7667208 Technique for confining secondary electrons in plasma-based ion implantation
‌
US Patent 7667214 Radiation attenuation system
‌
US Patent 7671328 Method of producing molecular profiles of isoparaffins by low emitter current field ionization mass spectrometry
‌
US Patent 7671329 Inductively coupled plasma mass spectrometer
‌
US Patent 7671330 High resolution mass spectrometry method and system for analysis of whole proteins and other large molecules
‌
US Patent 7671346 Light emitting apparatus and method for curing inks, coatings and adhesives
‌
US Patent 7675043 Mesh and method of observing rubber slice technical field
‌
US Patent 7675046 Terminal structure of an ion implanter
‌
US Patent 7679051 Ion composition analyzer with increased dynamic range
‌
US Patent 7679052 Methods of separating ionized particles
‌
US Patent 7679056 Metrology system of fine pattern for process control by charged particle beam
‌
US Patent 7679073 Medical device
‌
US Patent 7683314 Mass spectrometer
‌
US Patent 7683319 Charge control apparatus and measurement apparatus equipped with the charge control apparatus
‌
US Patent 7683347 Technique for improving ion implantation throughput and dose uniformity
‌
US Patent 7683348 Sensor for ion implanter
‌
US Patent 7687772 Mass spectrometric imaging method under ambient conditions using electrospray-assisted laser desorption ionization mass spectrometry
‌
US Patent 7687788 Debris prevention system, radiation system, and lithographic apparatus
‌
US Patent 7687790 EMI shielding of digital x-ray detectors with non-metallic enclosures
‌
US Patent 7692145 Method to analyze physical and chemical properties on the surface layer of a solid
‌
US Patent 7692159 Self-sterilizing input device
‌
US Patent 7692169 Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
‌
US Patent 7692170 Radiation apparatus
‌
US Patent 7692171 Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
‌
US Patent 7694347 Measuring device with daisy type cantilever wheel
‌
US Patent 7696475 Electrospray-assisted laser desorption ionization device, mass spectrometer, and method for mass spectrometry
‌
US Patent 7696477 Electric-field-enhancement structures including dielectric particles, apparatus including same, and methods of use
‌
US Patent 7696497 Focusing system and method for a charged particle imaging system
‌
US Patent 7696498 Electron beam lithography method and apparatus using a dynamically controlled photocathode
‌
US Patent 7697802 Optical bypass method and architecture
‌
US Patent 7705299 Scanning ion probe systems and methods of use thereof
‌
US Patent 7705300 Charged particle beam adjusting method and charged particle beam apparatus
‌
US Patent 7705303 Defect inspection and charged particle beam apparatus
‌
US Patent 7705323 Microscope stage with flexural axis
‌
US Patent 7705325 Sterilization device for a stethoscope and associated apparatus
‌
US Patent 7705332 Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometry
‌
US Patent 7709785 Method and apparatus for mass selective axial transport using quadrupolar DC
‌
US Patent 7709787 Stepped electric field detector
‌
US Patent 7709788 Chemical calibration method and system
‌
US Patent 7709816 Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication
‌
US Patent 7709817 Ion beams in an ion implanter
‌
US Patent 7709818 Particle beam irradiation apparatus and particle beam irradiation method
‌
US Patent 7714274 Integrated micro fuel processor and flow delivery infrastructure
‌
US Patent 7714275 Mass spectrometry with selective ion filtration by digital thresholding
‌
US Patent 7714282 Apparatus and method for forming a gas composition gradient between FAIMS electrodes
‌
US Patent 7714284 Methods and apparatus for enhanced sample identification based on combined analytical techniques
‌
US Patent 7714285 Spectrometer for surface analysis and method therefor
‌
US Patent 7714307 Method of designing a projection system, lithographic apparatus and device manufacturing method
‌
US Patent 7715676 Optical grating coupler
‌
US Patent 7718953 Electromagnetic/optical tweezers using a full 3D negative-refraction flat lens
‌
US Patent 7718958 Mass spectroscopic reaction-monitoring method
‌
US Patent 7718962 Defect imaging device and method
‌
US Patent 7718976 Charged particle beam apparatus
‌
US Patent 7718981 Composite charged-particle beam system
‌
US Patent 7718982 Programmable particle scatterer for radiation therapy beam formation
‌
US Patent 7723677 Wide range, very high resolution differential mobility analyzer (DMA)
‌
US Patent 7723678 Method and apparatus for surface desorption ionization by charged particles
‌
US Patent 7723679 Coaxial hybrid radio frequency ion trap mass analyzer
‌
US Patent 7723681 Observation method with electron beam
‌
US Patent 7723707 Techniques for plasma injection
‌
US Patent 7728284 Method of manipulating nanosize objects and utilization thereof
‌
US Patent 7728290 Orbital ion trap including an MS/MS method and apparatus
‌
US Patent 7728314 Infra-red source and gas sensor
‌
US Patent 7730547 Smart materials: strain sensing and stress determination by means of nanotube sensing systems, composites, and devices
‌
US Patent 7732762 Method of inspecting a specimen surface, apparatus and use of fluorescent material
‌
US Patent 7732764 Field emission electron gun and electron beam applied device using the same
‌
US Patent 7732791 Semiconductor testing method and semiconductor tester
‌
US Patent 7732793 Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
‌
US Patent 7732794 Extreme ultra violet light source apparatus
‌
US Patent 7737415 System for the control, verification and recording of the performance of a radioisotope generator's operations
‌
US Patent 7737418 Debris mitigation system and lithographic apparatus
‌
US Patent 7737421 Electron beam exposure apparatus and method for cleaning the same
‌
US Patent 7737425 Contamination barrier with expandable lamellas
‌
US Patent 7741600 Apparatus and method for providing ions to a mass analyzer
‌
US Patent 7741617 Fluid treatment system
‌
US Patent 7741620 Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate
‌
US Patent 7745784 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
‌
US Patent 7745786 Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
‌
US Patent 7750291 Mass spectrometric method and mass spectrometer for analyzing a vaporized sample
‌
US Patent 7750293 High-density FIB-SEM tomography via real-time imaging
‌
US Patent 7750295 Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
‌
US Patent 7750296 Scanning electron microscope and calibration of image distortion
‌
US Patent 7750297 Carbon nanotube collimator fabrication and application
‌
US Patent 7750320 System and method for two-dimensional beam scan across a workpiece of an ion implanter
‌
US Patent 7750321 Positioning device for positioning an aperture plate in an ion beam
‌
US Patent 7750326 Lithographic apparatus and cleaning method therefor
‌
US Patent 7755033 Method for analyzing minute amounts of Pd, Rh and Ru, and high frequency plasma mass spectroscope used for same
‌
US Patent 7755069 Ultra-bright pulsed electron beam with low longitudinal emittance
‌
US Patent 7759653 Electron beam apparatus
‌
US Patent 7759661 Electron beam emitter for sterilizing containers
‌
US Patent 7763848 Apparatus and method for controlling an electrostatically induced liquid spray
‌
US Patent 7763850 Method and device for the real-time measurement of the consumption of oil from an engine oil separation system, using radioactive tracers
‌
US Patent 7763866 Charged particle beam device with aperture
‌
US Patent 7763868 Object information acquisition apparatus and object information acquisition method
‌
US Patent 7763870 Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements
‌
US Patent 7765607 Probes and methods of making probes using folding techniques
‌
US Patent 7767961 Method for determining material interfacial and metrology information of a sample using atomic force microscopy
‌
US Patent 7767982 Optical auto focusing system and method for electron beam inspection tool
‌
US Patent 7767983 Exposure device
‌
US Patent 7767986 Method and apparatus for controlling beam current uniformity in an ion implanter
‌
US Patent 7772543 System and method for processing nanowires with holographic optical tweezers
‌
US Patent 7772544 Neutral beam source and method for plasma heating
‌
US Patent 7772553 Scanning electron microscope
‌
US Patent 7772570 Assembly for blocking a beam of radiation and method of blocking a beam of radiation
‌
US Patent 7772576 Shielding assembly for semiconductor manufacturing apparatus and method of using the same
‌
US Patent 7777197 Vacuum reaction chamber with x-lamp heater
‌
US Patent 7777201 Method for maskless particle-beam exposure
‌
US Patent 7777203 Substrate holding apparatus
‌
US Patent 7777205 Electron beam lithography system
‌
US Patent 7777207 Methods and apparatus for presenting images
‌
US Patent 7777208 Infra-red lighting system and device
‌
US Patent 7781732 Real-time S-parameter imager
‌
US Patent 7781751 Portable wavelength transforming converter for UV LEDs
‌
US Patent 7784107 High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
‌
US Patent 7786431 Magnetically modulated, spin vector correlated beam generator for projecting electrically right, neutral, or left beams
‌
US Patent 7791053 Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
‌
US Patent 7793356 Signal coupling system for scanning microwave microscope
‌
US Patent 7800079 Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
‌
US Patent 7800082 Electromagnet with active field containment
‌
US Patent 7800087 Workroom partition
‌
US Patent 7804063 Methods for detecting dihydrotestosterone by mass spectrometry
‌
US Patent 7804076 Insulator for high current ion implanters
‌
US Patent 7804077 Passive actinide self-burner
‌
US Patent 7807978 Divergent charged particle implantation for improved transistor symmetry
‌
US Patent 7807982 Particle beam irradiation system
‌
US Patent 7812306 Instruments for measuring nanoparticle exposure
‌
US Patent 7812321 Techniques for providing a multimode ion source
‌
US Patent 7812327 High-emissivity radiator
‌
US Patent 7814565 Nanostructure on a probe tip
‌
US Patent 7816655 Reflective electron patterning device and method of using same
‌
US Patent 7817888 Bragg grating elements for optical devices
‌
US Patent 7820965 Apparatus for detecting chemical substances and method therefor
‌
US Patent 7820980 High speed combination multi-mode ionization source for mass spectrometers
‌
US Patent 7820989 Method and apparatus for performing radiation treatment
‌
US Patent 7820991 Radiation source and device
‌
US Patent 7825374 Tandem time-of-flight mass spectrometer
‌
US Patent 7825376 Scintillator aspects for X-ray fluorescence visualizer, imager, or information provider
‌
US Patent 7825392 Cleaning process for radiopharmaceutical reusable pigs
‌
US Patent 7829846 Analytical system and method utilizing the dependence of signal intensity on matrix component concentration
‌
US Patent 7829850 Branched radio frequency multipole
‌
US Patent 7829865 Electrostatic deflector
‌
US Patent 7834314 Ion detection using a pillar chip
‌
US Patent 7834315 Method for STEM sample inspection in a charged particle beam instrument
‌
US Patent 7834316 Method for adjusting imaging magnification and charged particle beam apparatus
‌
US Patent 7834317 Scanning electron microscope and system for inspecting semiconductor device
‌
US Patent 7838820 Controlled kinetic energy ion source for miniature ion trap and related spectroscopy system and method
‌
US Patent 7838825 Method and apparatus for incorporating electrostatic concentrators and/or ion mobility separators with Raman, IR, UV, XRF, LIF and LIBS spectroscopy and/or other spectroscopic techniques
‌
US Patent 7838830 Charged particle beam apparatus and method for operating a charged particle beam apparatus
‌
US Patent 7838831 Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method
‌
US Patent 7838843 Carbon nano tube processing method, processing apparatus, and carbon nano tube dispersion liquid, carbon nano tube powder
‌
US Patent 7838846 Rocking toothbrush sanitizer
‌
US Patent 7838857 Inspection container
‌
US Patent 7842916 Method of and apparatus for analyzing ions adsorbed on surface of mask
‌
US Patent 7842919 Q-pole type mass spectrometer
‌
US Patent 7842934 Terminal structures of an ion implanter having insulated conductors with dielectric fins
‌
US Patent 7842937 Extreme ultra violet light source apparatus
‌
US Patent 7847247 Method of plasma particle simulation, storage medium, plasma particle simulator and plasma processing apparatus
‌
US Patent 7847249 Charged particle beam apparatus
‌
US Patent 7847269 Apparatus for and method of treating a fluid
‌
US Patent 7847274 Localization of a radioactive source within a body of a subject
‌
US Patent 7851742 Method and apparatus for identifying proteins in mixtures
‌
US Patent 7851751 Mass analysis with alternating bypass of a fragmentation device
‌
US Patent 7851774 System and method for direct writing to a wafer
‌
US Patent 7855356 Determination of chemical empirical formulas of unknown compounds using accurate ion mass measurement of all isotopes
‌
US Patent 7855360 Method and apparatus to accurately discriminate gas phase ions with several filtering devices in tandem
‌
US Patent 7855361 Detection of positive and negative ions
‌
US Patent 7858928 Nanostructured surfaces as a dual ionization LDI-DESI platform for increased peptide coverage in proteomic analysis
‌
US Patent 7858958 Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
‌
US Patent 7863564 Electric charged particle beam microscope and microscopy
‌
US Patent 7863580 Electron beam apparatus and an aberration correction optical apparatus
‌
US Patent 7863586 Writing data creation method and charged particle beam writing apparatus
‌
US Patent 7868307 Charged particle beam exposure system
‌
US Patent 7872228 Stacked well ion trap
‌
US Patent 7872239 Electrostatic lens assembly
‌
US Patent 7875847 Docking stand for analytical instrument
‌
US Patent 7880148 Reverse-Taylor cone ionization systems and methods of use thereof
‌
US Patent 7888637 Sample preparation plate for mass spectrometry
‌
US Patent 7888641 Electron microscope with electron spectrometer
‌
US Patent 7888642 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
‌
US Patent 7888660 Controlling the characteristics of implanter ion-beams
‌
US Patent 7893399 Methods for detecting dehydroepiandrosterone by mass spectrometry
‌
US Patent 7893402 Measurement of the mobility of mass-selected ions
‌
US Patent 7893413 Systems, devices, and methods for large area micro mechanical systems
‌
US Patent 7897925 System and method for high Z material detection
‌
US Patent 7897943 Controlling the characteristics of implanter ion-beams
‌
US Patent 7897948 EUV plasma discharge lamp with conveyor belt electrodes
‌
US Patent 7897949 Laminated lead-free X-ray protection material
‌
US Patent 7902498 Methods and apparatus for enhanced ion based sample detection using selective pre-separation and amplification
‌
US Patent 7902506 Phase-shifting element and particle beam device having a phase-shifting element
‌
US Patent 7906758 Systems and method for discovery and analysis of markers
‌
US Patent 7906759 Mass spectroscopy system and mass spectroscopy method
‌
US Patent 7906761 Charged particle beam apparatus
‌
US Patent 7906762 Compact scanning electron microscope
‌
US Patent 7910877 Mass spectral analysis of complex samples containing large molecules
‌
US Patent 7910880 Mass spectrometer
‌
US Patent 7910881 Mass spectrometry with laser ablation
‌
US Patent 7915577 Single-shot spatially-resolved imaging magnetometry using ultracold atoms
‌
US Patent 7915579 Method and apparatus of liquid sample-desorption electrospray ionization-mass specrometry (LS-DESI-MS)
‌
US Patent 7917966 Aligned nanostructures on a tip
‌
US Patent 7919746 Atmospheric pressure ion source performance enhancement
‌
US Patent 7919747 Mass spectrometer
‌
US Patent 7923699 Tracking control method and electron beam writing system
‌
US Patent 7923702 System and method for processing an object
‌
US Patent 7923704 Charged particle beam writing method
‌
US Patent 7928368 Micropillar array electrospray chip
‌
US Patent 7928370 Open probe method and device for sample introduction for mass spectrometry analysis
‌
US Patent 7928374 Resolution improvement in the coupling of planar differential mobility analyzers with mass spectrometers or other analyzers and detectors
‌
US Patent 7928383 Charged particle system including segmented detection elements
‌
US Patent 7928405 Magnetic lens assembly
‌
US Patent 7932495 Fast wafer inspection system
‌
US Patent 7935939 Radiotherapy apparatus controller and radiation irradiation method
‌
US Patent 7935947 Glass composition for ultraviolet light and optical device using the same
‌
US Patent 7939798 Tandem ionizer ion source for mass spectrometer and method of use
‌
US Patent 7939800 Arrangement and method for compensating emitter tip vibrations
‌
US Patent 7945966 Nanometric emitter/receiver guides
‌
US Patent 7947950 Energy focus for distance of flight mass spectometry with constant momentum acceleration and an ion mirror
‌
US Patent 7947951 Multi-beam ion/electron spectra-microscope
‌
US Patent 7947953 Charged particle detection apparatus and detection method
‌
US Patent 7947965 Ion source for generating negatively charged ions
‌
US Patent 7949216 Bragg grating elements for optical devices
‌
US Patent 7952067 Methods for detecting vitamin C by mass spectrometry
‌
US Patent 7952079 Localization of a radioactive source
‌
US Patent 7956324 Charged particle beam apparatus for forming a specimen image
‌
US Patent 7956337 Scribe process monitoring methodology
‌
US Patent 7958563 Method for using an atomic force microscope
‌
US Patent 7960692 Ion focusing and detection in a miniature linear ion trap for mass spectrometry
‌
US Patent 7960694 Mass spectrometer
‌
US Patent 7960697 Electron beam apparatus
‌
US Patent 7960708 Device and method for manufacturing a particulate filter with regularly spaced micropores
‌
US Patent 7964844 Sample inspection apparatus
‌
US Patent 7964858 Ultraviolet reflector with coolant gas holes and method
‌
US Patent 7973292 Neutralizer
‌
US Patent 7982187 Method and apparatus for photon-assisted evaluation of a plasma
‌
US Patent 7982198 Particle beam irradiation system
‌
US Patent 7985958 Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
‌
US Patent 7989763 Electrospray systems and methods
‌
US Patent 7989777 Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier
‌
US Patent 7999223 Multiple ion isolation in multi-reflection systems
‌
US Patent 8003934 Methods and apparatus for ion sources, ion control and ion measurement for macromolecules
‌
US Patent 8003939 Foreign matter or abnormal unsmoothness inspection apparatus and foreign matter or abnormal unsmoothness inspection method
‌
US Patent 8003952 Integrated deflectors for beam alignment and blanking in charged particle columns
‌
US Patent 8006315 Photon-emission scanning tunneling microscopy
‌
US Patent 8008635 Method for sample preparation
‌
US Patent 8008639 System for processing an object
‌
US Patent 8013297 Ion gate for dual ion mobility spectrometer and method thereof
‌
US Patent 8013311 Dual beam system
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US Patent 8013312 Vapor delivery system useful with ion sources and vaporizer for use in such system
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US Patent 8013297 Ion gate for dual ion mobility spectrometer and method thereof
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