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Tarifur Chowdhury
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Edits on 12 Aug, 2022
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Екатерина Петровская
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Patent primary examiner of
US Patent 7190632 Semiconductor memory device having improved column selection lines and method of driving the same
US Patent 7192848 Method for manufacturing mesa semiconductor device
US Patent 7193878 Semiconductor memory device layout including increased length connection lines
US Patent 7199678 Impedance matching apparatus for a plasma chamber comprising two separate storage units and calculators
US Patent 7199913 Curved support for mirror in optical scanning device
US Patent 7202701 Input/output circuit for handling unconnected I/O pads
US Patent 7214576 Manufacturing method of semiconductor device
US Patent 7215315 Shift register and display driving device comprising the same
US Patent 7217946 Method for making a wire nanostructure in a semiconductor film
US Patent 7230699 Sample orientation system and method
US Patent 7236253 Optical method measuring thin film growth
US Patent 7239383 Method and apparatus for spectral modulation compensation
US Patent 7242466 Remote pointing system, device, and methods for identifying absolute position and relative movement on an encoded surface by remote optical method
US Patent 7242485 Displacement gauge and displacement measuring method
US Patent 7245376 Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
US Patent 7245383 Optical image measuring apparatus for obtaining a signal intensity and spatial phase distribution of interference light
US Patent 7248018 Personal renewable-energy fueling and storage station for electric-powered vehicles
US Patent 7249894 System and process for post alignment polarization extinction ratio compensation in semiconductor laser system
US Patent 7251028 Scanning spectrum analyzer
US Patent 7251038 Light source stabilisation
US Patent 7251040 Single metal nanoparticle scattering interferometer
US Patent 7253898 System for detecting droplets on a translucent surface
US Patent 7253905 Determination and correction for laser induced CCD camera degradation
US Patent 7256884 Particle detecting system and method of detecting particles using the same
US Patent 7256890 Spectroscope and microspectroscope equipped therewith
US Patent 7259856 Method for the precise measurement of the wavelength of light
US Patent 7259861 Using a fixed-frequency of oscillation in an FTS system to measure scene inhomogeneity
US Patent 7259863 Grating interference type optical encoder
US Patent 7259870 3-dimensional image acquisition apparatus and method, 3-dimensional reconstruction system, and light projection unit and light projection method therefrom
US Patent 7262841 Laser alignment for ion source
US Patent 7265840 Coupling method for coupling high power optical beams into an optical waveguide
US Patent 7265841 Position detecting method
US Patent 7265842 Method for detecting a gaseous analyte present as a minor constituent in an admixture
US Patent 7268892 Method and device for the verification and identification of a measuring device
US Patent 7268894 Image measuring method, image measuring system and image measuring program
US Patent 7271893 Device and method for checking the level of moving transparent containers
US Patent 7271901 Thin-film characteristic measuring method using spectroellipsometer
US Patent 7271906 Image processing alignment method and method of manufacturing semiconductor device
US Patent 7271907 Lithographic apparatus with two-dimensional alignment measurement arrangement and two-dimensional alignment measurement method
US Patent 7271911 Method for the quantitative measurement of the pulse laser stability of synthetic fused silica glass
US Patent 7274452 Alignment apparatus
US Patent 7274454 Imaging system with programmable spectral switch
US Patent 7277170 Device and method for spectroscopic measurement with an imaging device comprising a matrix of photodetectors
US Patent 7277173 Active optical alignment using MEMS mirrors
US Patent 7277188 Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate
US Patent 7280211 Method of adjusting monitor axis
US Patent 7280220 Physical quantity measuring method and device therefor
US Patent 7280228 System and method of measurement, system and method of alignment, lithographic apparatus and method
US Patent 7283233 Curved grating spectrometer with very high wavelength resolution
US Patent 7283242 Optical spectroscopy apparatus and method for measurement of analyte concentrations or other such species in a specimen employing a semiconductor laser-pumped, small-cavity fiber laser
US Patent 7283243 Semiconductor diode laser spectrometer arrangement and method
US Patent 7286216 Exposure apparatus inspection method and exposure apparatus
US Patent 7286217 Power driven coaxial-rotating fast-orientation system and method
US Patent 7286238 Feature isolation for frequency-shifting interferometry
US Patent 7289210 Circularly polarized light method and device for determining wall thickness and orientations of fibrils of cellulosic fibres
US Patent 7292320 Laser crystallization apparatus and laser crystallization method
US Patent 7292329 Test head for optically inspecting workpieces comprising a lens for elongating a laser spot on the workpieces
US Patent 7292332 Method and apparatus for detecting faults in transparent material
US Patent 7292334 Binary arrays of nanoparticles for nano-enhanced Raman scattering molecular sensors
US Patent 7292339 Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool
US Patent 7292351 Method for determining a map, device manufacturing method, and lithographic apparatus
US Patent 7295293 Apparatus and method for testing a reflector coating
US Patent 7295305 Method and its apparatus for inspecting a pattern
US Patent 7295306 Microchip and fluorescent particle counter with microchip
US Patent 7295311 Methods and apparatus for electrophoretic mobility determination using phase light scattering analysis
US Patent 7295313 Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
US Patent 7295328 Method of and apparatus for determining tire shapes
US Patent 7298466 System and method for assembling optical components
US Patent 7298468 Method and measuring device for contactless measurement of angles or angle changes on objects
US Patent 7298474 Plasmonic and/or microcavity enhanced optical protein sensing
US Patent 7298478 Optical detector for a particle sorting system
US Patent 7298484 Dual-band sensor system utilizing a wavelength-selective beamsplitter
US Patent 7298485 Method of and a device for measuring optical absorption characteristics of a sample
US Patent 7298488 Surface-plasmon-resonance sensing technique using electro-optic modulation
US Patent 7298492 Method and system for on-line measurement of thickness and birefringence of thin plastic films
US Patent 7298494 Methods and systems for interferometric analysis of surfaces and related applications
US Patent 7301614 Lens-refracting characteristic measuring apparatus
US Patent 7304743 Diffuse reflectance readhead
US Patent 7307717 Optical flow cell capable of use in high temperature and high pressure environment
US Patent 7307727 Method and apparatus for forming substrate for semiconductor or the like
US Patent 7307731 Method of detecting test bodies
US Patent 7310146 Mark position measuring method and apparatus
US Patent 7315359 Method for monitoring micro-lens curvature in-line
US Patent 7315382 Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US Patent 7315383 Scanning 3D measurement technique using structured lighting and high-speed CMOS imager
US Patent 7317520 Method and apparatus for measuring brightness
US Patent 7317522 Verification of non-recurring defects in pattern inspection
US Patent 7317527 Spatial light modulator fourier transform
US Patent 7317530 Combined spatial filter and relay systems
US Patent 7319039 Aerosol-based detection of biological agents
US Patent 7319526 Apparatus for detecting displacement
US Patent 7319527 Sensor with cantilever and optical resonator
US Patent 7324192 Test apparatus and method for examining sheet-like components for perforations
US Patent 7324201 Yarn sensor
US Patent 7324202 Optical system
US Patent 7324207 Optical pulse correlator having an interferometer array
US Patent 7327457 Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
US Patent 7327462 Method and apparatus for direct detection of signals from a differential delay heterodyne interferometric system
US Patent 7330269 Single sensor ring laser gyroscope
US Patent 7330275 Method and system for determining the position and alignment of a surface of an object in relation to a laser beam
US Patent 7333198 Sample orientation system and method
US Patent 7333205 Broadband surface plasmon jets: direct observation of plasmon propagation for application to sensors and optical communications in microscale and nanoscale circuitry
US Patent 7336352 Position detection apparatus
US Patent 7336361 Spectroscopic ellipsometer and polarimeter systems
US Patent 7339669 Device for the analysis of the qualitative composition of gases
US Patent 7339671 Apparatus and method for monitoring biological cell culture
US Patent 7342662 Sample analyzer
US Patent 7342670 In-flight drop location verification system
US Patent 7342671 Sensor head of reflective optical encoder
US Patent 7345755 Defect inspecting apparatus and defect inspection method
US Patent 7345757 Inspection apparatus for pipelines
US Patent 7345771 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
US Patent 7349103 System and method for high intensity small spot optical metrology
US Patent 7349104 System and a method for three-dimensional imaging systems
US Patent 7352466 Gas detection and photonic crystal devices design using predicted spectral responses
US Patent 7352475 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
US Patent 7355684 Interferometric signal conditioner for measurement of the absolute length of gaps in a fiber optic Fabry-Perot interferometer
US Patent 7355702 Confocal observation system
US Patent 7355706 Particle detection system implemented with an immersed optical system
US Patent 7355709 Methods and systems for optical and non-optical measurements of a substrate
US Patent 7355712 Apparatus for measuring goniometric reflection property of sample
US Patent 7355715 Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method
US Patent 7355726 Linear variable reflector sensor and signal processor
US Patent 7359057 Method and apparatus for measuring small shifts in optical wavelengths
US Patent 7362436 Method and apparatus for measuring optical overlay deviation
US Patent 7362438 COD measuring method and device
US Patent 7362448 Characterizing residue on a sample
US Patent 7362449 Digital holographic microscope for 3D imaging and process using it
US Patent 7362453 Method for the characterization of a film
US Patent 7365853 Measuring method and measuring apparatus utilizing attenuated total reflection
US Patent 7365859 System and method for optical coherence imaging
US Patent 7369243 Optical measuring apparatus and optical measuring method
US Patent 7372560 Pattern inspection apparatus
US Patent 7372569 Method of correcting alignment errors in a segmented reflective surface
US Patent 7375812 Method and system for reducing parasitic spectral noise in tunable semiconductor source spectroscopy system
US Patent 7375818 Optical tomography system
US Patent 7388662 Real-time measuring of the spatial distribution of sprayed aerosol particles
US Patent 7388667 Optical determination of resistivity of phase change materials
US Patent 7403281 Raman spectrometer
US Patent 7408632 Miscibility determination of a combination of liquids
US Patent 7411665 Method for wavelength calibration of an optical measurement system
US Patent 7433025 Automated protein crystallization imaging
US Patent 7440102 Systems and methods for analyzing polarized light scattered from a sample
US Patent 7440109 Dither stripper having least-mean-squares adaptive updating of dither stripper gains
US Patent 7443515 Apparatus for measuring optical properties of tested optical system using interference
US Patent 7450243 Volumetric endoscopic coherence microscopy using a coherent fiber bundle
US Patent 7450244 Full circumferential scanning OCT intravascular imaging probe based on scanning MEMS mirror
US Patent 7456974 Optical measuring system for detecting geometric data of surfaces
US Patent 7460219 Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
US Patent 7460231 Alignment tool for a lithographic apparatus
US Patent 7460233 Pass-line and tilt insensitive sensor
US Patent 7460247 Full spectrum optical safeguard
US Patent 7460249 Measuring instrument of polygon-mirror motor
US Patent 7463364 Electro-optic sensor
US Patent 7466424 Displacement sensor based on photonic crystal waveguides
US Patent 7468789 Flow cytometer for rapid bacteria detection
US Patent 7471385 Systems and methods for selecting a reference database for determining a spectrum of an object based on fluorescence of the object
US Patent 7471394 Optical detection system with polarizing beamsplitter
US Patent 7474406 Stabilized solid-state laser gyro and anisotropic lasing medium
US Patent 7475997 Reflective display device with high retroreflectivity
US Patent 7477387 Method and apparatus for analyzing optical characteristics of optical medium and method for production monitoring
US Patent 7480034 Apparatus for characterizing fiber bragg gratings
US Patent 7480047 Time-domain computation of scattering spectra for use in spectroscopic metrology
US Patent 7483128 Foreign matter inspection apparatus and method
US Patent 7483146 Systems configured to provide illumination of a specimen or to inspect a specimen
US Patent 7483147 Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer
US Patent 7486389 Lens meter for measuring refractive power distribution
US Patent 7486402 Optical image measuring apparatus
US Patent 7486405 Optimized reference level generation
US Patent 7489393 Enhanced simultaneous multi-spot inspection and imaging
US Patent 7489407 Error correction in interferometry systems
US Patent 7489408 Optical edge break gage
US Patent 7495760 Device and method for evaluating optical distortion of transparent plate body
US Patent 7495770 Beam shear reduction in interferometry systems
US Patent 7495771 Exposure apparatus
US Patent 7495773 In situ determination of pixel mapping in interferometry
US Patent 7499151 Distributed Brillouin sensor system based on DFB lasers using offset locking
US Patent 7499162 Method and apparatus for observing and inspecting defects
US Patent 7499173 Interferometric method and apparatus for measuring optical signal quality in optical communications system
US Patent 7499174 Lensless imaging with reduced aperture
US Patent 7499181 System for measurement of projected turbulence downwind of an aircraft
US Patent 7499182 Optical signal measurement system
US Patent 7502117 Interferometer with ghost suppression
US Patent 7502119 Thin-film metrology using spectral reflectance with an intermediate in-line reference
US Patent 7505137 Optical wavelength meter
US Patent 7505138 Holographically compensated, self-referenced interferometer
US Patent 7505143 Dynamic reference plane compensation
US Patent 7508512 Continuous optical self-alignment for light curtains and optical presence sensors for simplification and maintenance of alignment
US Patent 7508523 Interferometric system for complex image extraction
US Patent 7508524 Combined raman spectroscopy-optical coherence tomography (RS-OCT) system and applications of the same
US Patent 7508529 Multi-range non-contact probe
US Patent 7511827 Interferometer and method of calibrating the interferometer
US Patent 7515269 Surface-enhanced-spectroscopic detection of optically trapped particulate
US Patent 7515277 Stage apparatus, control system, exposure apparatus, and device manufacturing method
US Patent 7515280 Displacement transducer with selectable detector area
US Patent 7518712 Tilted edge for optical-transfer-function measurement
US Patent 7522279 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
US Patent 7522288 Compensation of systematic effects in low coherence interferometry
US Patent 7525664 Device and method for optical detecting substances contained in waste gases of chemical processes
US Patent 7528962 Apparatus and methods for reducing non-cyclic non-linear errors in interferometry
US Patent 7532320 Multimodal method for identifying hazardous agents
US Patent 7535578 Lithographic apparatus and interferometer system
US Patent 7535581 Nanometer-level mix-and-match scanning tip and electron beam lithography using global backside position reference marks
US Patent 7538860 System and method for determination of the reflection wavelength of multiple low-reflectivity bragg gratings in a sensing optical fiber
US Patent 7538890 Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
US Patent 7542143 Liquid measurement cell having a pressurized air cavity therein
US Patent 7542149 Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector
US Patent 7545520 System and method for CD determination using an alignment sensor of a lithographic apparatus
US Patent 7548305 Shallow angle shape sensor
US Patent 7548308 Illumination energy management in surface inspection
US Patent 7548319 Interferometric method and apparatus for measuring physical parameters
US Patent 7551274 Defect detection lighting system and methods for large glass sheets
US Patent 7551286 Measurement apparatus
US Patent 7551295 Displacement sensor
US Patent 7554666 Sensor with optical pressure transducer and method of manufacturing a sensor component
US Patent 7554667 Method and apparatus for characterizing hyperspectral instruments
US Patent 7554673 Obtaining information about analytes using optical cavity output light
US Patent 7554675 Light wavefront measuring instrument, light wavefront measuring method, and light source adjusting method
US Patent 7554678 Device and method for measuring the thickness of a transparent sample
US Patent 7557936 Digitizer adapter
US Patent 7561267 Flow cytometer
US Patent 7561268 Evaporative light scattering detector
US Patent 7561276 Demodulation method and apparatus for fiber optic sensors
US Patent 7561279 Scanning simultaneous phase-shifting interferometer
US Patent 7564568 Phase shifting interferometry with multiple accumulation
US Patent 7570350 Detecting different spectral components of an optical signal by means of an optical shutter
US Patent 7570360 Optical absorption spectrometer and method for measuring concentration of a substance
US Patent 7573578 Micro-electromechanical system Fabry-Perot filter mirrors
US Patent 7573580 Optical position measuring system and method using a low coherence light source
US Patent 7576846 Apparatus and method of non-sampling-based Q-factor measuring
US Patent 7580137 Method and apparatus for determining one or more physical properties of a rolled smoking article or filter rod
US Patent 7583370 Resonant structures and methods for encoding signals into surface plasmons
US Patent 7583371 Combined bragg grating wavelength interrogator and brillouin backscattering measuring instrument
US Patent 7583380 Spectroscopic analysis apparatus and method with excitation system and focus monitoring system
US Patent 7583385 Optical tomography system
US Patent 7583386 Method and apparatus for optically analyzing a surface
US Patent 7583387 Seismic exploration
US Patent 7586606 Near-field polarized-light measurement apparatus
US Patent 7586618 Distinguishing non-resonant four-wave-mixing noise in coherent stokes and anti-stokes Raman scattering
US Patent 7586619 Spectral balancing system and method for reducing noise in fiber optic gyroscopes
US Patent 7589842 Optical tomograph for automatically adjusting optical path length differences
US Patent 7593113 Large areas undistorted imaging apparatus for light speckles and method thereof
US Patent 7593114 Device and method for focusing a laser light beam
US Patent 7593116 Apparatus and method for detecting error of transfer system
US Patent 7595865 Optical time domain reflectometry for two segment fiber optic systems having an optical amplifier therebetween
US Patent 7595866 Method for measuring non-circularity at core portion of optical fiber parent material
US Patent 7595881 Fluorescence measurement system with enhanced rejection of scattered light
US Patent 7595884 Measurement of sample reflectance
US Patent 7595886 Wavelength monitor using interference signals
US Patent 7595891 Measurement of the top surface of an object with/without transparent thin films in white light interferometry
US Patent 7599049 Apparatus for testing light transmission through lens
US Patent 7599067 Ultra-short optical pulse measurement using a thick nonlinear crystal
US Patent 7599069 Vector beam generator using a passively phase stable optical interferometer
US Patent 7602501 Interferometric synthetic aperture microscopy
US Patent 7602502 Methods of testing and manufacturing optical elements
US Patent 7602506 Method for contactlessly and dynamically detecting the profile of a solid body
US Patent 7605928 Two-dimensional nanopositioner with crude and fine stages
US Patent 7609389 Measurement apparatus for measuring surface map
US Patent 7612878 Device for inspecting a pipeline
US Patent 7612881 Method of alignment of an optical module and an optical module using thereof
US Patent 7612891 Measurement of thin films using fourier amplitude
US Patent 7612892 Imaging optical system configured with through the lens optics for producing control information
US Patent 7616324 Ultra precision profile measuring method
US Patent 7619747 Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device
US Patent 7619748 Exposure apparatus mounted with measuring apparatus
US Patent 7623234 System and method for detecting and identifying an analyte
US Patent 7623235 Curved grating spectrometer with very high wavelength resolution
US Patent 7626687 Optical imaging device suitable for forming images of fingerprints
US Patent 7633618 Method and apparatus for measuring the relative position of a first and a second alignment mark
US Patent 7633624 Self compensating cube corner interferometer
US Patent 7636167 Dual technology optical profilometer
US Patent 7639368 Tracking algorithm for linear array signal processor for Fabry-Perot cross-correlation pattern and method of using same
US Patent 7643133 Air cargo power drive unit for detecting motion of an overlying cargo container
US Patent 7643151 Optical measuring device for measuring a plurality of surfaces of an object to be measured
US Patent 7643154 Optical image measurement device
US Patent 7643155 Partially coherent illumination for inverse scattering full-field interferometric synthetic aperture microscopy
US Patent 7643157 Phase shift amount measurement apparatus and transmittance measurement apparatus
US Patent 7643159 Three-dimensional shape measuring system, and three-dimensional shape measuring method
US Patent 7646475 Device for automatically measuring characteristics of an ophthalmic lens
US Patent 7646495 System and computer readable medium for pre-focus of digital slides
US Patent 7649619 Optical time domain reflectometer
US Patent 7649629 Optical imaging apparatus with spectral detector
US Patent 7649630 Optimized transmissive reference level generation
US Patent 7649631 Distance/speed meter and distance/speed measuring method
US Patent 7649633 Method and instrument for measuring complex dielectric constant of a sample by optical spectral measurement
US Patent 7649636 Optical metrology system and metrology mark characterization device
US Patent 7652755 Apparatus and method for color measurement and color grading of diamonds, gemstones and the like
US Patent 7652757 Method and apparatus for inspection of security articles incorporating a diffractive optical projection element
US Patent 7652762 Antiglare supports and contrast amplifying supports for polarized light reflection
US Patent 7652768 Chemical sensing apparatus and chemical sensing method
US Patent 7656510 Stream-wise thermal gradient cloud condensation nuclei chamber
US Patent 7656512 Method for determining lithographic focus and exposure
US Patent 7656537 Device for determining the position of spaced-apart areas in transparent and/or diffuse objects
US Patent 7659993 Method and device for wave-front sensing
US Patent 7663753 Apparatus and methods for detecting overlay errors using scatterometry
US Patent 7667830 Mixer-based time domain reflectometer and method
US Patent 7667831 Method and device for inspecting a surface of an optical component
US Patent 7667832 System for identifying refractive-index fluctuations of a target
US Patent 7667835 Apparatus and method for preventing copper peeling in ECP
US Patent 7667840 Particle-measuring system and particle-measuring method
US Patent 7667848 Imaging apparatus for infrared rays nonlinear molecular vibrational microscopy
US Patent 7667849 Optical sensor with interferometer for sensing external physical disturbance of optical communications link
US Patent 7667852 Measuring the shape, thickness variation, and material inhomogeneity of a wafer
US Patent 7667853 Quantum bit reading device and method
US Patent 7671974 Cuvette apparatus and system for measuring optical properties of a liquid such as blood
US Patent 7675613 Defect inspection method
US Patent 7675622 Determining a media feature using a photovoltaic cell and an electroluminescent light panel
US Patent 7675623 Standard device for origin of light absorbance and method of using the same
US Patent 7675626 Method of detecting drug resistant microorganisms by surface plasmon resonance system
US Patent 7675628 Synchronous frequency-shift mechanism in Fizeau interferometer
US Patent 7675630 System and method for selectively setting optical navigation resolution
US Patent 7679732 Optical-fiber-characteristic measuring apparatus and optical-fiber-characteristic measuring method
US Patent 7679740 Method and apparatus for multimodal detection
US Patent 7679758 Fastener inspection system and method
US Patent 7684023 Apparatus and method for generating THz wave by heterodyning optical and electrical waves
US Patent 7684033 Apparatus at a spinning preparatory plant for detecting foreign objects in fibre material
US Patent 7684035 Chemical and biological sensing using metallic particles in amplifying and absorbing media
US Patent 7684037 Spectrometer with collimated input light
US Patent 7684038 Overlay metrology target
US Patent 7684039 Overlay metrology using the near infra-red spectral range
US Patent 7684040 Overlay mark and application thereof
US Patent 7684042 Device having an optical part for analyzing micro particles
US Patent 7684045 Probe apparatus for measuring a color property of a liquid
US Patent 7684051 Fiber optic seismic sensor based on MEMS cantilever
US Patent 7688430 Method and apparatus for measuring the birefringence autocorrelation length in optical fibers
US Patent 7688449 Microchip testing device
US Patent 7688454 Scatterometry metrology using inelastic scattering
US Patent 7692781 Glazing inspection
US Patent 7692784 Apparatus and methods relating to enhanced spectral measurement systems
US Patent 7692785 System and method for optical power management
US Patent 7692795 Optical component, optical sensor, surface plasmon sensor and fingerprint recognition device
US Patent 7697122 Measuring device, method, program, and recording medium
US Patent 7697123 Method of measuring the differential group delay of an optical fiber connection
US Patent 7697135 Scanning focal length metrology
US Patent 7697137 Monolithic Offner spectrometer
US Patent 7697143 Reliable low loss hollow core fiber resonator
US Patent 7701561 Polarization imaging apparatus
US Patent 7701570 Collimated light method and system for detecting defects in honeycombs
US Patent 7701578 Planar micro-discharge gas detector
US Patent 7701579 Fluorescence sensor
US Patent 7701584 Light path circuit apparatus and ring laser gyro
US Patent 7701586 Micro-optical wall shear stress sensor
US Patent 7705984 Spectroscope having spectroscopic paths with individual collimators
US Patent 7705987 Fluorescence correlation microscopy with real-time alignment readout
US Patent 7705997 Method of measuring topology of functional liquid droplet in pixel, topology measuring apparatus of functional liquid in pixel, liquid ejection apparatus, method of manufacturing electro-optical apparatus, electro-optical apparatus, and electronic apparatus
US Patent 7710557 Surface defect inspection method and apparatus
US Patent 7710561 Transspectral illumination
US Patent 7710566 Method and apparatus for photoacoustic measurements
US Patent 7710574 Devices in miniature for interferometric use and fabrication thereof
US Patent 7710575 Solid-state laser gyro having orthogonal counterpropagating modes
US Patent 7710580 Vibration resistant interferometry
US Patent 7710582 Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate
US Patent 7715000 Particle detection system, and lithographic apparatus provided with such particle detection system
US Patent 7715003 Metalized semiconductor substrates for raman spectroscopy
US Patent 7715007 Lateral shift measurement using an optical technique
US Patent 7715020 Three-dimensional shape measuring system
US Patent 7715022 Apparatus and method for measuring shape
US Patent 7715024 Method of and apparatus for determining geometrical dimensions of a wheel rim, in particular when fitting and/or removing a motor vehicle tyre
US Patent 7719673 Defect inspecting device for sample surface and defect detection method therefor
US Patent 7719686 System for measuring a color property of a liquid
US Patent 7719687 Apparatus for measuring reflection characteristics of object surfaces
US Patent 7719692 Methods, systems and computer program products for optical coherence tomography (OCT) using automatic dispersion compensation
US Patent 7724357 Backside contamination inspection device
US Patent 7724361 Apparatus and method of inspecting defects in photomask and method of fabricating photomask
US Patent 7724370 Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell
US Patent 7724374 Coaxial diffuse reflectance read head
US Patent 7724375 Method and apparatus for increasing metrology or inspection tool throughput
US Patent 7724376 Wavefront-aberration measuring method and device, and exposure apparatus including the device
US Patent 7728962 Device for visualizing a mark on a spectacle lense
US Patent 7728967 Laser-based maintenance apparatus
US Patent 7728985 Polarization-sensitive common path optical coherence reflectometry/tomography device
US Patent 7728987 Method of manufacturing an optical element
US Patent 7733475 Defect inspecting apparatus
US Patent 7733481 Facilitating surface enhanced Raman spectroscopy
US Patent 7733482 System and method for determining at least one constituent in an ambient gas using a microsystem gas sensor
US Patent 7733483 Method for ascertaining the orientation of molecules in biological specimens
US Patent 7733493 Fourier transform spectrometer
US Patent 7733500 Wavefront sensor with optical path difference compensation
US Patent 7738113 Wafer measurement system and apparatus
US Patent 7738119 Optical inspection system for a wafer
US Patent 7742157 Method and apparatus for acoustic sensing using multiple optical pulses
US Patent 7742158 Method and apparatus for locally measuring refractive characteristics of a lens in one or several specific points of said lens
US Patent 7742159 Apparatus for checking concentricity between lens barrel and barrel holder
US Patent 7746451 On-chip microplasma systems
US Patent 7746475 Microgyroscope
US Patent 7746479 Wavefront-aberration measuring device and exposure apparatus including the device
US Patent 7746480 Apparatus for characterizing fiber Bragg gratings
US Patent 7751041 Fluorescence detection apparatus
US Patent 7751047 Alignment and alignment marks
US Patent 7751048 Optofluidic microscope device
US Patent 7751051 Method for cross interference correction for correlation spectroscopy
US Patent 7751053 Optical detection and analysis of particles
US Patent 7751057 Magnetomotive optical coherence tomography
US Patent 7755760 Particle counter for measuring floating particles which can effectively reduce false counts
US Patent 7755763 Attenuated total reflection sensor
US Patent 7755777 Wavelength selection method, film thickness measurement method, film thickness measurement apparatus, and system for producing thin film silicon device
US Patent 7760347 Design-based method for grouping systematic defects in lithography pattern writing system
US Patent 7760349 Mask-defect inspecting apparatus with movable focusing lens
US Patent 7760352 Dual pulse single event Raman spectroscopy
US Patent 7760360 Monitoring a photolithographic process using a scatterometry target
US Patent 7760366 System for measuring the image quality of an optical imaging system
US Patent 7764363 Method and apparatus for acoustic sensing using multiple optical pulses
US Patent 7764364 Lens meter for measuring optical characteristics of a lens
US Patent 7764368 Method and apparatus for inspecting defects on mask
US Patent 7764370 System and method to zero chambers in a surgical cassette
US Patent 7764373 Fine particle constituent measuring method and fine-particle constituent measuring apparatus
US Patent 7764379 Semiconductor laser natural gas analysis system and method
US Patent 7764384 Swept frequency laser metrology system
US Patent 7764387 Apparatus and method for measuring suspension and head assemblies in a stack
US Patent 7768638 Systems for and methods of facilitating focusing an optical scanner
US Patent 7768642 Wide field compact imaging catadioptric spectrometer
US Patent 7768651 Optical coherence tomography apparatus based on spectral interference and an ophthalmic apparatus
US Patent 7768654 On-chip phase microscope/beam profiler based on differential interference contrast and/or surface plasmon assisted interference
US Patent 7768656 System and method for three-dimensional measurement of the shape of material objects
US Patent 7773216 Composite sheet material selection method for use in ultra-fast laser patterning
US Patent 7773227 Optofluidic microscope device featuring a body comprising a fluid channel and having light transmissive regions
US Patent 7773232 Apparatus and method for determining trench parameters
US Patent 7777881 Laser device and microscope
US Patent 7777893 Optical image measurement device
US Patent 7777897 Veneer roughness detection
US Patent 7782451 Device for and method of inspecting surface condition having different curvatures
US Patent 7782456 Direct ICP emission spectral analysis method of solid sample
US Patent 7782460 Laser diode array downhole spectrometer
US Patent 7782461 Flow rate measuring device
US Patent 7782467 Method for measuring volume by an optical surface profilometer in a micromechanical device and a system for carrying out said measurement
US Patent 7787118 Apparatus and method for obtaining spectral information
US Patent 7787127 System and method to determine chromatic dispersion in short lengths of waveguides using a common path interferometer
US Patent 7787129 Method and apparatus for measurement of optical properties in tissue
US Patent 7787131 Sensitivity modulated imaging systems with shearing interferometry and related methods
US Patent 7791724 Characterization of transmission losses in an optical system
US Patent 7791726 Tool positioning and/or identification device and method
US Patent 7791728 System for optically analyzing a substance with a selected single-wavelength
US Patent 7791734 High-resolution retinal imaging using adaptive optics and Fourier-domain optical coherence tomography
US Patent 7796241 Egg micro-crack detection systems
US Patent 7796251 Method, apparatus and system for rapid and sensitive standoff detection of surface contaminants
US Patent 7796266 Optical detection system using electromagnetic radiation to detect presence or quantity of analyte
US Patent 7796267 System, method and apparatus for a micromachined interferometer using optical splitting
US Patent 7796269 Irregularly shaped actuator fingers for a micro-electromechanical system fabry-perot filter
US Patent 7796271 Ear canal hologram for hearing apparatuses
US Patent 7796274 System for measuring the image quality of an optical imaging system
US Patent 7796317 Processing method and processing apparatus using interfered laser beams
US Patent 7796326 Apparent incoherence method
US Patent 7800743 Method and apparatus for fiber optic signature recognition
US Patent 7800752 Wavelength dependent reflective sample substrates for raman and fluorescence spectroscopy
US Patent 7800755 High-speed polarimeter having a multi-wavelength source
US Patent 7800761 Infrared interferometric-spatial-phase imaging using backside wafer marks
US Patent 7804592 Method for measuring a surface plasmon resonance and noble metal compound used for the same
US Patent 7804596 Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay key
US Patent 7804604 In-flight drop location verification system
US Patent 7808617 Dual resolution, dual range sensor system and method
US Patent 7808619 System for assembling a fluid analysis apparatus
US Patent 7808638 Scatterometry target and method
US Patent 7808646 Interferometer for optically measuring an object
US Patent 7808649 Fixed-point detector and displacement-measuring apparatus
US Patent 7812938 Integrated chemical separation light scattering device
US Patent 7812939 Spectrometric measurements during blending / mixing
US Patent 7812952 Device for reading plates bearing biological reaction support microdepositions
US Patent 7812956 Time dependent fluorescence measurements
US Patent 7812957 Light measurement apparatus measuring two-dimensional physical properties of a sample
US Patent 7812958 Interferential spectroscopy detector and camera
US Patent 7812965 Multiple-degree of freedom interferometer with compensation for gas effects
US Patent 7812967 Microscopy method and microscope
US Patent 7812971 Multi color autofocus apparatus and method
US Patent 7817257 Method for measuring a differential mode delay of a multimode optical fiber
US Patent 7817268 Alignment system for spectroscopic analysis
US Patent 7817269 High resolution optical microscopy featuring fluorescence transient measurement
US Patent 7817270 Nanosecond flash photolysis system
US Patent 7817273 Two-dimensional spectral imaging system
US Patent 7817278 Surface plasmon resonance sensor apparatus having multiple dielectric layers
US Patent 7821637 System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing
US Patent 7821640 Method and device for reconstructing a three-dimensional fluorescence optical tomography image by double measurement
US Patent 7821643 Common path systems and methods for frequency domain and time domain optical coherence tomography using non-specular reference reflection and a delivering device for optical radiation with a partially optically transparent non-specular reference reflector
US Patent 7821644 Apparatus for visual inspection
US Patent 7821645 Microstructural feature and material property monitoring device for metallic material
US Patent 7821655 In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction
US Patent 7826041 Register mark detection apparatus
US Patent 7826051 Coherently controlled nonlinear raman spectroscopy
US Patent 7826063 Compensation of effects of atmospheric perturbations in optical metrology
US Patent 7826066 Compact achromatic optical interferometer of the three-wave lateral shearing type
US Patent 7830513 Optical interrogation system and microplate position correction method
US Patent 7830515 Method and apparatus for detection of bioaerosols
US Patent 7830532 Door/gate monitoring sensor device
US Patent 7834992 Method and its apparatus for detecting defects
US Patent 7834994 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
US Patent 7835000 System and method for measuring particles in a sample stream of a flow cytometer or the like
US Patent 7835001 Method of aligning a substrate, mask to be aligned with the same, and flat panel display apparatus using the same
US Patent 7835002 System for multi- and hyperspectral imaging
US Patent 7835009 Apparatus and method to detect and correct for mode hop wavelength error in optical component measurement systems
US Patent 7835011 Systems and methods for determining a position of a support
US Patent 7835017 Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
US Patent 7835018 Optical method for controlling thin film growth
US Patent 7839493 Apparatus and method for detecting particulates in water
US Patent 7839499 Hydrogen sensor
US Patent 7839504 Multiple order common path spectrometer
US Patent 7839509 Method of measuring deep trenches with model-based optical spectroscopy
US Patent 7843555 Thermoplastic plastic and method for producing the same
US Patent 7843556 Portable device and method for on-site detection and quantification of drugs
US Patent 7843565 Optical gas monitor
US Patent 7843570 Crystal oscillator sensor and substance adsorption detection method using the sensor
US Patent 7843571 Sensing system
US Patent 7847929 Methods and apparatus for inspecting a plurality of dies
US Patent 7847931 Measuring equipment
US Patent 7847932 System and method for improved biodetection
US Patent 7847933 Cars microscopy and spectroscopy using ultrafast chirped pulses
US Patent 7847934 Method for correcting spectral interference in ICP emission spectroscopy (OES)
US Patent 7847935 Method and apparatus for gas concentration quantitative analysis
US Patent 7847939 Overlay measurement target
US Patent 7847950 Method and a system for generating three- or two-dimensional images
US Patent 7848031 Hologram and method of manufacturing an optical element using a hologram
US Patent 7852470 System and method for improved biodetection
US Patent 7852489 Method for measuring surface profile, and apparatus using the same
US Patent 7855786 Single camera multi-spectral imager
US Patent 7855790 Dimension measuring apparatus
US Patent 7859658 Thin micropolarizing filter, and a method for making it
US Patent 7859667 Slide misload detection system and method
US Patent 7859668 Apparatus and method for illuminator-independent color measurements
US Patent 7859670 System and method for detecting fluorescence in microfluidic chip
US Patent 7859680 Optical image measurement device
US Patent 7859681 Pressure transmitter for detection of a variable relative to a process fluid
US Patent 7864313 Metal nano-void photonic crystal for enhanced raman spectroscopy
US Patent 7864325 Interferometer, demodulator, and splitting element
US Patent 7864337 Positioning apparatus, exposure apparatus, and device manufacturing method
US Patent 7869013 Surface plasmon resonance and quartz crystal microbalance sensor
US Patent 7869014 System for measuring the wavelength dispersion and nonlinear coefficient of an optical fiber
US Patent 7869016 Fiber damage detection and protection device
US Patent 7869034 Multi-angle and multi-channel inspecting device
US Patent 7869035 Sample table for a food analyzing device
US Patent 7869042 Fluorometers
US Patent 7869043 Automated passive skin detection system through spectral measurement
US Patent 7869058 Apparatuses and methods for evaluating performance of optical systems
US Patent 7872733 Tracking type laser interferometer and method for resetting the same
US Patent 7872735 Method and apparatus for referencing a MEMS device
US Patent 7876428 Method and a device for measuring the power of an ophthalmic lens by combined feeling and contactless overall measurement
US Patent 7876429 Method and apparatus as well as corrective optical system for evaluating restoration-premised lens
US Patent 7876436 Irradiation unit for a flow-cytometry-based analytical instrument and analytical instrument including the same
US Patent 7876439 Multi layer alignment and overlay target and measurement method
US Patent 7876440 Apparatus and methods for detecting overlay errors using scatterometry
US Patent 7876444 Plasmonic conveyor apparatus, system and method
US Patent 7876448 Fiber-optic current sensor with sum detection
US Patent 7876449 Laser interferometer
US Patent 7876450 Common-path interferometer rendering amplitude and phase of scattered light
US Patent 7876457 Laser metrology system and method
US Patent 7880880 Alignment systems and methods for lithographic systems
US Patent 7880881 Method of improving cheese quality
US Patent 7880893 Sensor apparatus and method using optical interferometry
US Patent 7880896 Interferometer using vertical-cavity surface-emitting lasers
US Patent 7880902 Contactless optical probe and device and method making use thereof
US Patent 7884930 Integrated quartz biological sensor and method
US Patent 7884935 Pattern transfer apparatus, imprint apparatus, and pattern transfer method
US Patent 7884937 Airborne tunable mid-IR laser gas-correlation sensor
US Patent 7884945 Methods and apparatus for optical coherence tomography scanning
US Patent 7889329 Analysis of optical data with the aid of histograms
US Patent 7889333 Visual inspection system for ceramic balls
US Patent 7889358 Color filter inspection method, color filter manufacturing method, and color filter inspection apparatus
US Patent 7894047 Blood analyzer, sample analyzer, and flow cytometer
US Patent 7894048 Optical sheet and method for manufacturing the same
US Patent 7894049 Method and device for measuring polarization state and polarization mode dispersion in photonic transmission systems
US Patent 7894057 Methods of analyzing samples using broadband laser light
US Patent 7894059 Film formation processing apparatus and method for determining an end-point of a cleaning process
US Patent 7894077 Multi-directional projection type moire interferometer and inspection method of using the same
US Patent 7898657 System and method for verifying the contents of a filled, capped pharmaceutical prescription
US Patent 7898662 Method and apparatus for angular-resolved spectroscopic lithography characterization
US Patent 7898664 Method for measuring chromaticity values by a colorimeter
US Patent 7898670 Distortion measurement imaging system
US Patent 7898671 Interferometer having a mirror system for measuring a measured object
US Patent 7903253 Microscope
US Patent 7903255 Sagnac sensor with nested waveguides
US Patent 7903256 Methods, systems, and computer program products for performing real-time quadrature projection based Fourier domain optical coherence tomography
US Patent 7903260 Scatterometry metrology using inelastic scattering
US Patent 7907262 Surface shape measurement apparatus and method
US Patent 7907264 Measurement of thin film porosity
US Patent 7907276 Film quality evaluation method, apparatus therefor, and production system for thin-film device
US Patent 7911594 Method to derive physical properties of a sample after correcting the effects of interdetector band broadening
US Patent 7911597 Inspection apparatus to simultaneously measure the sugar content and weight of fruit
US Patent 7911607 Light measuring device and scanning optical system
US Patent 7911608 Spectroscopic determination of enantiomeric purity
US Patent 7911612 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
US Patent 7911618 Holographic interferometry for non-destructive testing of power sources
US Patent 7911622 System and method for using slow light in optical sensors
US Patent 7916280 Blood analyzer and blood analyzing method for classifying white blood cells
US Patent 7916284 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
US Patent 7916288 Defect inspection method
US Patent 7916291 Apparatus and method for spectroscopy
US Patent 7916296 Method and apparatus for adjusting a color point of a light source
US Patent 7916298 Analyzer and analytic system
US Patent 7916303 Non-uniform sampling to extend dynamic range of interferometric sensors
US Patent 7920253 Polarization optical time domain reflectometer and method of determining PMD
US Patent 7920259 Arrangement for an optical system for polarization-dependent, time-resolved optical spectroscopy, optical measurement systems and method for the polarization-dependent spectroscopic analysis of measurement light
US Patent 7920264 Horizontal attenuated total reflection system
US Patent 7920270 Apparatus for interferometric sensing
US Patent 7920273 Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer
US Patent 7920274 Method of measuring topology of functional liquid droplet in pixel, topology measuring apparatus of functional liquid in pixel, liquid ejection apparatus, method of manufacturing electro-optical apparatus, electro-optical apparatus, and electronic apparatus
US Patent 7920276 Tracking system using fixed optical radiators
US Patent 7924412 Apparatus and method for characterizing electrophoretic display mediums
US Patent 7924413 Nanowire-based photonic devices
US Patent 7924428 Optical rotary adaptor and optical tomographic imaging apparatus using the same
US Patent 7924434 Systems configured to generate output corresponding to defects on a specimen
US Patent 7924435 Apparatus and method for measuring characteristics of surface features
US Patent 7929130 Illumination sources and customizable spectral profiles
US Patent 7933015 Mark for alignment and overlay, mask having the same, and method of using the same
US Patent 7933016 Apparatus and methods for detecting overlay errors using scatterometry
US Patent 7933018 Spectral imaging for downhole fluid characterization
US Patent 7933021 System and method for cladding mode detection
US Patent 7933023 Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus
US Patent 7933024 Optical coherence tomographic imaging apparatus and optical coherence tomographic imaging method
US Patent 7940384 Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen
US Patent 7940392 Lithographic apparatus, device manufacturing method and device manufactured thereby
US Patent 7940393 Method and system for approximating the spectrum of a plurality of color samples
US Patent 7940396 Measuring an appearance property of a surface using a spatially under-sampled bidirectional reflectance distribution function
US Patent 7940398 Optical coherence tomography apparatus
US Patent 7944559 Airborne hyperspectral imaging system
US Patent 7944561 Measuring an appearance property of a surface using a bidirectional reflectance distribution function
US Patent 7948621 Systems and methods for remote monitoring of contaminants in fluids
US Patent 7952692 Method and apparatus for determination of analyte concentration
US Patent 7952696 Exposure measurement method and apparatus, and semiconductor device manufacturing method
US Patent 7952706 Multi-channel fiber optic spectroscopy systems employing integrated optics modules
US Patent 7952715 Printing device, method of controlling printing device, and recording medium
US Patent 7952716 Coaxial diffuse reflectance read head
US Patent 7952723 Optical coherence tomography apparatus
US Patent 7952725 Surface shape measurement apparatus and exposure apparatus
US Patent 7952728 Robot-controlled optical measurement array, and method and auxiliary mechanism for calibrating said measurement array
US Patent 7961311 Detecting and counting bacteria suspended in biological fluids
US Patent 7961323 Microarray imaging system and associated methodology
US Patent 7965385 Installation for candling eggs and optoelectronic system for examining under radiation such an installation
US Patent 7965394 Method and apparatus for identifying dynamic characteristics of a vibratory object
US Patent 7965396 Enhanced laser projector calibration wall
US Patent 7969562 Method and apparatus for measuring the birefringence autocorrelation length in optical fibers
US Patent 7969570 Applications of laser-processed substrate for molecular diagnostics
US Patent 7969576 Optical sensing based on wavelength modulation spectroscopy
US Patent 7969580 Method and system for step-and-align interference lithography
US Patent 7973925 Apparatus for stabilizing mechanical, thermal, and optical properties and for reducing the fluorescence of biological samples for optical evaluation
US Patent 7973927 Two-photon microscope with spectral resolution
US Patent 7973928 Spectroscopic instrument, image producing device, spectroscopic method, and image producing method
US Patent 7973933 Method for spectroscopy of surface plasmons in surface plasmon resonance sensors and an element for the use of thereof
US Patent 7973937 Near field suppression with a multi-aperture imaging system
US Patent 7973939 Differential-phase polarization-sensitive optical coherence tomography system
US Patent 7978338 Compound reference interferometer
US Patent 7978345 Guidance system and method
US Patent 7982868 Apparatus and method for checking of containers
US Patent 7982872 Residual chemical monitoring system using surface enhanced raman spectroscopy
US Patent 7982876 Apparatus and method for inspecting a stream of matter by light scattering inside the matter
US Patent 7982877 Method for measuring the anisotropy in an element comprising at least one fissile material and a corresponding installation
US Patent 7982880 Optical image measurement device
US Patent 7986405 Foreign matter inspection method and foreign matter inspection apparatus
US Patent 7990525 Flow cytometer and flow cytometry
US Patent 7990532 Method and apparatus for multimodal detection
US Patent 7995198 Optical fiber feature distribution sensor
US Patent 7995203 Method for on-site drug detection in illicit drug samples
US Patent 7995207 Spectral interferometry method and apparatus
US Patent 7999933 Method for calibrating imaging spectrographs
US Patent 7999934 Spectroscopic device and raman spectroscopic system
US Patent 7999935 Laser microscope with a physically separating beam splitter
US Patent 7999946 Fiber optic particle motion sensor system
US Patent 8004670 Apparatus and method for spectrophotometric analysis
US Patent 8004672 Closed cell for use in spectrophotometers
US Patent 8004678 Wafer level alignment structures using subwavelength grating polarizers
US Patent 8004692 Optical interferometer and method
US Patent 8009286 Surface inspecting method and device
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US Patent 8004692 Optical interferometer and method
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US Patent 8004672 Closed cell for use in spectrophotometers
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US Patent 8004670 Apparatus and method for spectrophotometric analysis
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US Patent 7999946 Fiber optic particle motion sensor system
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US Patent 7999935 Laser microscope with a physically separating beam splitter
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US Patent 7999934 Spectroscopic device and raman spectroscopic system
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US Patent 7999933 Method for calibrating imaging spectrographs
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US Patent 7995203 Method for on-site drug detection in illicit drug samples
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US Patent 7995207 Spectral interferometry method and apparatus
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US Patent 7995198 Optical fiber feature distribution sensor
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US Patent 7990532 Method and apparatus for multimodal detection
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US Patent 7990525 Flow cytometer and flow cytometry
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US Patent 7986405 Foreign matter inspection method and foreign matter inspection apparatus
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US Patent 7982880 Optical image measurement device
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