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D. Rutledge

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Edits on 14 Dec, 2021
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Golden AI
edited on 14 Dec, 2021
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Patent primary examiner of
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US Patent 7086791 Mechanical interface using single stroke opener for multi-container chemical cartridge
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US Patent 7088420 Printing system with opposed printhead assemblies for double-side printing
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US Patent 7088424 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
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US Patent 7092068 Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device
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US Patent 7095480 Cooling apparatus
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US Patent 7098991 Exposure method, exposure apparatus, and method for manufacturing device
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US Patent 7102727 Optical system for use in exposure apparatus and device manufacturing method using the same
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US Patent 7102728 Imaging optical system evaluation method, imaging optical system adjustment method, exposure apparatus and exposure method
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US Patent 7102730 Exposure device
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US Patent 7108433 Thermal processor employing varying roller spacing
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US Patent 7110084 Illumination optical system and exposure apparatus
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US Patent 7110089 Drive mechanism, exposure device, optical equipment, and device manufacturing method
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US Patent 7113255 Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby
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US Patent 7113256 Lithographic apparatus and device manufacturing method with feed-forward focus control
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US Patent 7116396 Exposure device, exposure method and device manufacturing method
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US Patent 7116400 Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method
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US Patent 7118296 Photosensitive material processor
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US Patent 7119877 Exposure apparatus including a non-contact utilities transfer assembly
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US Patent 7119880 Projection optical system, exposure apparatus, and device manufacturing method
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US Patent 7123341 Image recording apparatus
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US Patent 7123345 Automatic focusing apparatus
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US Patent 7125178 Photographic processing arrangement and a processing solution supply cartridge for the processing arrangement
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US Patent 7126666 Lithographic apparatus, device manufacturing method and device manufactured thereby
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US Patent 7128481 Substrate processing apparatus for inspecting processing history data
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US Patent 7130018 Catoptric projection optical system, exposure apparatus and device fabrication method
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US Patent 7133115 Positioning device, exposure apparatus using the positioning device, and device production method
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US Patent 7136148 Lithographic apparatus and device manufacturing method
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US Patent 7142283 Exposure apparatus
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US Patent 7145629 Exposure technique
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US Patent 7145632 Cooling apparatus
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US Patent 7145634 Lithographic apparatus and device manufacturing method
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US Patent 7145635 Exposure method and apparatus
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US Patent 7147390 Replenishment system for a print media processor
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US Patent 7148948 Scanning exposure apparatus, and device manufacturing method
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US Patent 7148949 Lithographic apparatus and device manufacturing method
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US Patent 7148950 Lithographic apparatus and device manufacturing method
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US Patent 7148952 Lithographic apparatus and device manufacturing method
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US Patent 7148953 Apochromatic unit-magnification projection optical system
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US Patent 7151588 Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
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US Patent 7151591 Alignment system, alignment method, and lithographic apparatus
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US Patent 7153045 Electro-mechanical system and method for mixing replenishment for plate precursor developers
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US Patent 7154582 Exposure apparatus and method
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US Patent 7154583 Movement method, exposure method and exposure apparatus, and device manufacturing method
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US Patent 7161656 Method of and apparatus for generating a beam of light
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US Patent 7161658 Lithographic apparatus and device manufacturing method
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US Patent 7161660 Photolithography system and method of monitoring the same
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US Patent 7167232 Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus
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US Patent 7168866 Multi-chamber washing device for photosensitive material
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US Patent 7170578 Pattern control system
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US Patent 7170579 Light source unit, exposure apparatus, and device manufacturing method
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US Patent 7170582 Support device and lightographic apparatus
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US Patent 7170584 Lithographic apparatus and device manufacturing method
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US Patent 7170585 Projection lens and microlithographic projection exposure apparatus
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US Patent 7170586 Lithographic apparatus and device manufacturing method
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US Patent 7173686 Offner imaging system with reduced-diameter reflectors
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US Patent 7177008 Exposure apparatus and method
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US Patent 7177010 Lithographic apparatus and device manufacturing method
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US Patent 7179000 Method of developing a resist film and a resist development processor
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US Patent 7180571 Lithographic projection apparatus and actuator
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US Patent 7180572 Immersion optical projection system
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US Patent 7180574 Exposure apparatus and method
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US Patent 7180577 Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane
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US Patent 7182531 Developing method and apparatus
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US Patent 7184125 Exposure device
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US Patent 7184128 Lithographic apparatus and device manufacturing method
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US Patent 7184129 Positioning method, and positioning apparatus
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US Patent 7187431 Lithographic apparatus, method of determining properties thereof and computer program
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US Patent 7187432 Holding system, exposure apparatus, and device manufacturing method
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US Patent 7189015 Method for replenishing development replenisher in automatic developing machine for photosensitive lithographic printing plate precursor
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US Patent 7190434 Lithographic apparatus and device manufacturing method
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US Patent 7190435 Pattern writing apparatus and pattern writing method
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US Patent 7193682 Exposure apparatus and device manufacturing method
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US Patent 7195407 Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program
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US Patent 7199861 Lithographic apparatus and device manufacturing method
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US Patent 7199863 Method of imaging using lithographic projection apparatus
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US Patent 7202935 Imprinting apparatus with independently actuating separable modules
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US Patent 7202939 Lithographic apparatus and device manufacturing method
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US Patent 7207733 Photographic developer effluent transfer station and drain wash
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US Patent 7209213 Lithographic apparatus and device manufacturing method
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US Patent 7210864 Coating and developing apparatus
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US Patent 7210865 Automatic developing apparatus and process for forming image using the same
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US Patent 7212273 Exposure apparatus and method of producing device
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US Patent 7212274 Cooling system, exposure apparatus having the same, and device manufacturing method
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US Patent 7212276 Exposure apparatus
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US Patent 7215409 Image forming method and apparatus
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US Patent 7218377 Exposure apparatus and device manufacturing method
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US Patent 7218378 Digital image processing system
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US Patent 7218382 Load-lock technique
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US Patent 7218383 Holding system, exposure apparatus, and device manufacturing method
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US Patent 7224427 Megasonic immersion lithography exposure apparatus and method
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US Patent 7224439 Method and imaging apparatus for imaging a structure onto a semiconductor wafer by means of immersion lithography
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US Patent 7224440 Lithographic apparatus and device manufacturing method
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US Patent 7224442 Supply control system and method, program, and information storage medium
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US Patent 7226223 Camera with motorized film advancement
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US Patent 7227614 Measurement method, device manufacturing method and lithographic apparatus
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US Patent 7227618 Pattern generating systems
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US Patent 7227619 Lithographic apparatus and device manufacturing method
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US Patent 7230672 Image recording apparatus and image recording method
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US Patent 7230675 Lithographic apparatus, device manufacturing method and device manufactured therewith
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US Patent 7230677 Lithographic apparatus and device manufacturing method utilizing hexagonal image grids
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US Patent 7236228 Exposure apparatus
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US Patent 7236231 Exposure apparatus and device manufacturing method
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US Patent 7237967 Developing apparatus and method
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US Patent 7242459 Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated Eigen decomposition model
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US Patent 7245349 Exposure apparatus
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US Patent 7245827 Image recording apparatus
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US Patent 7248335 Exposure apparatus, device manufacturing method, stage apparatus, and alignment method
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US Patent 7248338 Multi beam exposing device and exposing method using the same
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US Patent 7248339 Lithographic apparatus and device manufacturing method
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US Patent 7249854 Virtual digital shape projector
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US Patent 7251012 Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
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US Patent 7251013 Lithographic apparatus and device manufacturing method
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US Patent 7253882 Exposure method and exposure system
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US Patent 7256867 Lithographic apparatus and device manufacturing method
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US Patent 7259827 Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby
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US Patent 7260321 Image recording apparatus
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US Patent 7262831 Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
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US Patent 7265812 Cooling apparatus
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US Patent 7267497 Coating and developing system and coating and developing method
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US Patent 7271874 Method and apparatus for variable polarization control in a lithography system
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US Patent 7275879 Processing device of photo-sensitive material
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US Patent 7277158 Lithographic apparatus and device manufacturing method
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US Patent 7281869 Coating and developing system and coating and developing method
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US Patent 7283200 System and method for measuring displacement of a stage
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US Patent 7283201 Devices and methods for sensing secure attachment of an object onto a chuck
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US Patent 7283207 Exposure apparatus
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US Patent 7286206 Exposure apparatus
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US Patent 7287919 Developing process and apparatus
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US Patent 7287920 Semiconductor manufacturing apparatus and method
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US Patent 7290948 Substrate processing apparatus and substrate processing method
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US Patent 7295288 Systems and methods of imprint lithography with adjustable mask
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US Patent 7295289 Continuous paper feed system
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US Patent 7298457 Alignment apparatus, exposure apparatus, and device manufacturing method using exposure apparatus
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US Patent 7307687 Lithographic apparatus, device manufacturing method and substrate
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US Patent 7307690 Device manufacturing method, computer program product and lithographic apparatus
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US Patent 7310132 Lithographic apparatus and device manufacturing method
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US Patent 7315348 Exposure apparatus, focal point detecting method, exposure method and device manufacturing method
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US Patent 7315351 Lithographic apparatus, device manufacturing method and device manufactured therewith
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US Patent 7315352 Offner imaging system with reduced-diameter reflectors
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US Patent 7316515 Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid
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US Patent 7317511 Light modulator, and optical apparatus using the same
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US Patent 7321724 Photographic method and photographic apparatus
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US Patent 7322756 Coating and developing apparatus and coating and developing method
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US Patent 7327437 Lithographic apparatus and device manufacturing method
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US Patent 7327439 Lithographic apparatus and device manufacturing method
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US Patent 7338223 Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processing
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US Patent 7344322 Drying device and drying method
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US Patent 7345738 Certified cells and method of using certified cells for fabricating a device
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US Patent 7349067 Lithographic apparatus and device manufacturing method
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US Patent 7349068 Lithographic apparatus and device manufacturing method
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US Patent 7349069 Lithographic apparatus and positioning apparatus
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US Patent 7352438 Lithographic apparatus and device manufacturing method
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US Patent 7352439 Lithography system, control system and device manufacturing method
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US Patent 7355675 Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
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US Patent 7355677 System and method for an improved illumination system in a lithographic apparatus
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US Patent 7359029 Lithographic apparatus and method of reducing thermal distortion
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US Patent 7359031 Lithographic projection assembly, load lock and method for transferring objects
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US Patent 7359033 Exposure method and apparatus
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US Patent 7359035 Digital exposure apparatus for a color enlarging photoprinter
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US Patent 7365827 Lithographic apparatus and device manufacturing method
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US Patent 7367725 Method for removing developing solution
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US Patent 7371023 Apparatus for processing substrates and method therefor
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US Patent 7372541 Lithographic apparatus and device manufacturing method
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US Patent 7372542 Immersion exposure technique
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US Patent 7375792 Apparatus for measuring feature widths on masks for the semiconductor industry
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US Patent 7375795 Lithographic apparatus, device manufacturing method, and device manufactured thereby
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US Patent 7375796 Lithographic apparatus and device manufacturing method
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US Patent 7375797 Utilities transfer system in a lithography system
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US Patent 7379154 Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
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US Patent 7385671 High speed lithography machine and method
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US Patent 7388647 Method and system for real time uniformity feedback
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US Patent 7456928 Systems and methods for controlling ambient pressure during processing of microfeature workpieces, including during immersion lithography
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US Patent 7511797 Lithography system, control system and device manufacturing method
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US Patent 7518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus
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US Patent 7525635 Contamination barrier and lithographic apparatus
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US Patent 7525640 Lithographic apparatus and device manufacturing method
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US Patent 7528929 Lithographic apparatus and device manufacturing method
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US Patent 7532309 Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid
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US Patent 7542127 Lithographic apparatus and method for manufacturing a device
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US Patent 7545478 Lithographic apparatus, thermal conditioning system, and method for manufacturing a device
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US Patent 7545481 Lithographic apparatus and device manufacturing method
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US Patent 7545483 Optical element unit for exposure processes
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US Patent 7586581 Developing method of photoresist and developing device
Edits on 3 Dec, 2021
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Golden AI
edited on 3 Dec, 2021
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Infobox
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US Patent 7586581 Developing method of photoresist and developing device
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Golden AI
edited on 2 Dec, 2021
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Infobox
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US Patent 7545483 Optical element unit for exposure processes
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Golden AI
edited on 2 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 7545481 Lithographic apparatus and device manufacturing method
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Golden AI
edited on 2 Dec, 2021
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Golden AI
edited on 2 Dec, 2021
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US Patent 7542127 Lithographic apparatus and method for manufacturing a device
Edits on 2 Dec, 2021
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Golden AI
edited on 2 Dec, 2021
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Golden AI
edited on 2 Dec, 2021
Edits made to:
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Patent primary examiner of
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US Patent 7528929 Lithographic apparatus and device manufacturing method
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Golden AI
edited on 2 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 7525640 Lithographic apparatus and device manufacturing method
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Golden AI
edited on 2 Dec, 2021
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Infobox
Patent primary examiner of
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US Patent 7525635 Contamination barrier and lithographic apparatus
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Golden AI
edited on 2 Dec, 2021
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Infobox (+1 properties)
Infobox
Patent primary examiner of
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US Patent 7518708 Liquid-immersion exposure method and liquid-immersion exposure apparatus
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Golden AI
edited on 2 Dec, 2021
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Infobox (+1 properties)
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Patent primary examiner of
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US Patent 7511797 Lithography system, control system and device manufacturing method
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Golden AI
edited on 1 Dec, 2021
Edits on 30 Nov, 2021
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Golden AI
edited on 30 Nov, 2021
Edits made to:
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US Patent 7388647 Method and system for real time uniformity feedback
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Golden AI
edited on 30 Nov, 2021
Edits made to:
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Infobox
Patent primary examiner of
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US Patent 7385671 High speed lithography machine and method
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Golden AI
edited on 29 Nov, 2021
Golden AI profile picture
Golden AI
edited on 29 Nov, 2021
Edits made to:
Infobox (+1 properties)
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Patent primary examiner of
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US Patent 7375797 Utilities transfer system in a lithography system
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Golden AI
edited on 29 Nov, 2021
Edits made to:
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Infobox
Patent primary examiner of
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US Patent 7375796 Lithographic apparatus and device manufacturing method
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Golden AI
edited on 29 Nov, 2021
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Infobox
Patent primary examiner of
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US Patent 7375795 Lithographic apparatus, device manufacturing method, and device manufactured thereby
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Golden AI
edited on 29 Nov, 2021
Edits made to:
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Patent primary examiner of
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US Patent 7375792 Apparatus for measuring feature widths on masks for the semiconductor industry

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